Lawrance Sheu

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
PVD target with end of service life detection capability
- Patent number 8,795,486
- Issue date Aug 5, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD target with end of service life detection capability
- Patent number 8,276,648
- Issue date Oct 2, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjustable anode assembly for a substrate wet processing apparatus
- Patent number 8,101,052
- Issue date Jan 24, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
PVD target with end of service life detection capability
- Patent number 7,891,536
- Issue date Feb 22, 2011
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjustable electrodes and coils for plasma density distribution con...
- Patent number 7,829,815
- Issue date Nov 9, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Lin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for yield and productivity improvements in semico...
- Patent number 7,642,100
- Issue date Jan 5, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Publication number 20120131784
- Publication date May 31, 2012
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Publication number 20110126397
- Publication date Jun 2, 2011
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADJUSTABLE ANODE ASSEMBLY FOR A SUBSTRATE WET PROCESSING APPARATUS
- Publication number 20080121526
- Publication date May 29, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ADJUSTABLE ELECTRODES AND COILS FOR PLASMA DENSITY DISTRIBUTION CON...
- Publication number 20080083710
- Publication date Apr 10, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Ying-Lin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR YIELD AND PRODUCTIVITY IMPROVEMENTS IN SEMICO...
- Publication number 20080064127
- Publication date Mar 13, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas distribution apparatuses and methods for controlling gas distri...
- Publication number 20070163716
- Publication date Jul 19, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Publication number 20070068804
- Publication date Mar 29, 2007
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF USING A TARGET HAVING END OF SERVICE LIFE DETECTION CAPAB...
- Publication number 20070068796
- Publication date Mar 29, 2007
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY
- Publication number 20070068803
- Publication date Mar 29, 2007
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Li Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for removing organic materials during formation of a metal...
- Publication number 20050245082
- Publication date Nov 3, 2005
- Taiwan Semiconductor Manufacturing Co.
- Baw-Ching Perng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Lawrance Sheu

Person

Patents Grantslast 30 patents

PVD target with end of service life detection capability

PVD target with end of service life detection capability

Adjustable anode assembly for a substrate wet processing apparatus

PVD target with end of service life detection capability

Adjustable electrodes and coils for plasma density distribution con...

Method and system for yield and productivity improvements in semico...

Patents Applicationslast 30 patents

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

ADJUSTABLE ANODE ASSEMBLY FOR A SUBSTRATE WET PROCESSING APPARATUS

ADJUSTABLE ELECTRODES AND COILS FOR PLASMA DENSITY DISTRIBUTION CON...

METHOD AND SYSTEM FOR YIELD AND PRODUCTIVITY IMPROVEMENTS IN SEMICO...

Gas distribution apparatuses and methods for controlling gas distri...

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

METHOD OF USING A TARGET HAVING END OF SERVICE LIFE DETECTION CAPAB...

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

Process for removing organic materials during formation of a metal...