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Lawrence D. Bartholomew
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Santa Cruz, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Atmospheric pressure wafer processing reactor having an internal pr...
Patent number
6,761,770
Issue date
Jul 13, 2004
Aviza Technology Inc.
Lawrence D. Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Free floating shield and semiconductor processing system
Patent number
6,352,592
Issue date
Mar 5, 2002
Silicon Valley Group, Thermal Systems LLC
Lawrence Duane Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer processing reactor having a gas flow control system and method
Patent number
6,143,080
Issue date
Nov 7, 2000
Silicon Valley Group Thermal Systems LLC
Lawrence D. Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Free floating shield and semiconductor processing system
Patent number
6,056,824
Issue date
May 2, 2000
Silicon Valley Group Thermal Systems
Lawrence Duane Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Free floating shield
Patent number
5,849,088
Issue date
Dec 15, 1998
Watkins Johnson Company
Jay Brian DeDontney
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Injector and method for delivering gaseous chemicals to a surface
Patent number
5,136,975
Issue date
Aug 11, 1992
Watkins Johnson Company
Lawrence D. Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atmospheric pressure chemical vapor deposition apparatus
Patent number
4,834,020
Issue date
May 30, 1989
Watkins Johnson Company
Lawrence D. Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Vapor Based Site-Isolated Processing Systems and Methods
Publication number
20170233868
Publication date
Aug 17, 2017
Intermolecular, Inc.
Bernardo Donoso
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITING A THIN FILM
Publication number
20120237695
Publication date
Sep 20, 2012
2-Pye Solar, LLC
Thomas Pye
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Gas manifold valve cluster
Publication number
20070028838
Publication date
Feb 8, 2007
Craig Bercaw
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multilayer multicomponent high-k films and methods for depositing t...
Publication number
20060264066
Publication date
Nov 23, 2006
Aviza Technology, Inc.
Larry D. Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of depositing an oxide film by chemical vapor deposition
Publication number
20040018735
Publication date
Jan 29, 2004
Seung G. Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Atmospheric pressure wafer processing reactor having an internal pr...
Publication number
20030094136
Publication date
May 22, 2003
Lawrence D. Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Protective shield and system for gas distribution
Publication number
20030061991
Publication date
Apr 3, 2003
ASML US, Inc.
Colby Mattson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas distribution system
Publication number
20020192377
Publication date
Dec 19, 2002
Lawrence Duane Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas distribution system
Publication number
20010047756
Publication date
Dec 6, 2001
Lawrence Duane Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...