Lawrence D. Rotter

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 11,913,874
- Issue date Feb 27, 2024
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 10,969,328
- Issue date Apr 6, 2021
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 10,215,688
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Systems for providing illumination in optical metrology
- Patent number 10,203,247
- Issue date Feb 12, 2019
- KLA-Tencor Corporation
- Gregory R. Brady
- F21 - LIGHTING
Information Patent Grant
Broadband and wide field angle compensator
- Patent number 9,857,292
- Issue date Jan 2, 2018
- KLA-Tencor Corporation
- Lawrence Rotter
- G02 - OPTICS
Information Patent Grant
Broadband and wide field angle compensator
- Patent number 9,519,093
- Issue date Dec 13, 2016
- KLA-Tencor Corporation
- Lawrence Rotter
- G02 - OPTICS
Information Patent Grant
Systems for providing illumination in optical metrology
- Patent number 9,512,985
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 9,400,246
- Issue date Jul 26, 2016
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
- Patent number 9,310,290
- Issue date Apr 12, 2016
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Light source tracking in optical metrology system
- Patent number 9,146,156
- Issue date Sep 29, 2015
- KLA-Tencor Corporation
- Guorong V. Zhuang
- G01 - MEASURING TESTING
Information Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
- Patent number 9,116,103
- Issue date Aug 25, 2015
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Discrete polarization scatterometry
- Patent number 8,896,832
- Issue date Nov 25, 2014
- KLA-Tencor Corp.
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Angle-resolved spectroscopic instrument
- Patent number 8,643,841
- Issue date Feb 4, 2014
- KLA-Tencor Corporation
- Lawrence D. Rotter
- G01 - MEASURING TESTING
Information Patent Grant
System and method for performing photothermal measurements and rela...
- Patent number 8,111,399
- Issue date Feb 7, 2012
- KLA-Tencor Corporation
- Lawrence D. Rotter
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system with separate optimized beam paths
- Patent number 7,227,637
- Issue date Jun 5, 2007
- Therma-Wave, Inc.
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Flat spectrum illumination source for optical metrology
- Patent number 7,154,607
- Issue date Dec 26, 2006
- Therma-Wave, Inc.
- James Lee Hendrix
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system with separate optimized beam paths
- Patent number 7,061,614
- Issue date Jun 13, 2006
- Therma-Wave, Inc.
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Diffractive optical elements and grid polarizers in focusing spectr...
- Patent number 6,784,991
- Issue date Aug 31, 2004
- Therma-Wave, Inc.
- Lawrence D. Rotter
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES
- Publication number 20210223166
- Publication date Jul 22, 2021
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20190195782
- Publication date Jun 27, 2019
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Systems for Providing Illumination in Optical Metrology
- Publication number 20170146399
- Publication date May 25, 2017
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Application
Broadband And Wide Field Angle Compensator
- Publication number 20170052112
- Publication date Feb 23, 2017
- KLA-Tencor Corporation
- Lawrence Rotter
- G02 - OPTICS
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20170016815
- Publication date Jan 19, 2017
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
- Publication number 20150285735
- Publication date Oct 8, 2015
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
Broadband And Wide Field Angle Compensator
- Publication number 20150055123
- Publication date Feb 26, 2015
- KLA-Tencor Corporation
- Lawrence Rotter
- G02 - OPTICS
Information Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
- Publication number 20140375981
- Publication date Dec 25, 2014
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
Systems for Providing Illumination in Optical Metrology
- Publication number 20140240951
- Publication date Aug 28, 2014
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Application
Calibration Of An Optical Metrology System For Critical Dimension A...
- Publication number 20130245985
- Publication date Sep 19, 2013
- KLA-Tencor Corporation
- Klaus Flock
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20130169966
- Publication date Jul 4, 2013
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM
- Publication number 20130033704
- Publication date Feb 7, 2013
- KLA-Tencor Corporation
- Guorong V. Zhuang
- G01 - MEASURING TESTING
Information Patent Application
DISCRETE POLARIZATION SCATTEROMETRY
- Publication number 20110310388
- Publication date Dec 22, 2011
- KLA-Tencor Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELA...
- Publication number 20100328670
- Publication date Dec 30, 2010
- KLA-Tencor Technologies Corporation
- Lawrence D. Rotter
- G01 - MEASURING TESTING
Information Patent Application
Measurement system with separate optimized beam paths
- Publication number 20060180761
- Publication date Aug 17, 2006
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
Flat spectrum illumination source for optical metrology
- Publication number 20040150828
- Publication date Aug 5, 2004
- James Lee Hendrix
- G01 - MEASURING TESTING
Information Patent Application
Measurement system with separate optimized beam paths
- Publication number 20030071996
- Publication date Apr 17, 2003
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
Diffractive optical elements and grid polarizers in focusing spectr...
- Publication number 20020191185
- Publication date Dec 19, 2002
- Lawrence D. Rotter
- G01 - MEASURING TESTING

Lawrence D. Rotter

Person

Patents Grantslast 30 patents

Optical metrology tool equipped with modulated illumination sources

Optical metrology tool equipped with modulated illumination sources

Optical metrology tool equipped with modulated illumination sources

Systems for providing illumination in optical metrology

Broadband and wide field angle compensator

Broadband and wide field angle compensator

Systems for providing illumination in optical metrology

Optical metrology tool equipped with modulated illumination sources

Multiple angles of incidence semiconductor metrology systems and me...

Light source tracking in optical metrology system

Multiple angles of incidence semiconductor metrology systems and me...

Discrete polarization scatterometry

Angle-resolved spectroscopic instrument

System and method for performing photothermal measurements and rela...

Measurement system with separate optimized beam paths

Flat spectrum illumination source for optical metrology

Measurement system with separate optimized beam paths

Diffractive optical elements and grid polarizers in focusing spectr...

Patents Applicationslast 30 patents

OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES

Optical Metrology Tool Equipped with Modulated Illumination Sources

Systems for Providing Illumination in Optical Metrology

Broadband And Wide Field Angle Compensator

Optical Metrology Tool Equipped with Modulated Illumination Sources

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...

Broadband And Wide Field Angle Compensator

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...

Systems for Providing Illumination in Optical Metrology

Calibration Of An Optical Metrology System For Critical Dimension A...

Optical Metrology Tool Equipped with Modulated Illumination Sources

LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM

DISCRETE POLARIZATION SCATTEROMETRY

SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELA...

Measurement system with separate optimized beam paths

Flat spectrum illumination source for optical metrology

Measurement system with separate optimized beam paths

Diffractive optical elements and grid polarizers in focusing spectr...