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Lawrence M. Ficarra
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Billerica, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for serial ion implanting productivity enhancements
Patent number
7,019,315
Issue date
Mar 28, 2006
Varian Semiconductor Equipment Associates, Inc.
Alan P. Sheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for multi-wafer scanning in ion implanters
Patent number
6,995,381
Issue date
Feb 7, 2006
Varian Semiconductor Equipment Associates, Inc.
Alan P. Sheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Wafer-handling method, system, and apparatus
Publication number
20070081880
Publication date
Apr 12, 2007
Benjamin B. Riordon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and apparatus for enabling multiple process steps on a sing...
Publication number
20060258128
Publication date
Nov 16, 2006
Peter Nunan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Technique for reducing backside particles
Publication number
20060124155
Publication date
Jun 15, 2006
David Edwin Suuronen
B08 - CLEANING
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Patent Application
System and method for multi-wafer scanning in ion implanters
Publication number
20050121626
Publication date
Jun 9, 2005
Varian Semiconductor Equipment Associates, Inc.
Alan P. Sheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for serial ion implanting productivity enhancements
Publication number
20050121627
Publication date
Jun 9, 2005
Varian Semiconductor Equipment Associates, Inc.
Alan P. Sheng
H01 - BASIC ELECTRIC ELEMENTS