Lawrence P. Muray

Person

Katonah, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ensemble of deep learning models for defect review in high volume m...
- Patent number 12,211,196
- Issue date Jan 28, 2025
- KLA Corp.
- Kuljit S. Virk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Segmented multi-channel, backside illuminated, solid state detector...
- Patent number 11,699,607
- Issue date Jul 11, 2023
- KLA Corporation
- John Gerling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection and review using transmissive current image of ch...
- Patent number 11,410,830
- Issue date Aug 9, 2022
- KLA Corporation
- Hong Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrayed column detector
- Patent number 11,239,048
- Issue date Feb 1, 2022
- KLA Corporation
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-high sensitivity hybrid inspection with full wafer coverage c...
- Patent number 10,545,099
- Issue date Jan 28, 2020
- KLA-Tencor Corporation
- Grace Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Array-based characterization tool
- Patent number 10,438,769
- Issue date Oct 8, 2019
- KLA-Tencor Corporation
- Alex Lipkind
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging apparatus having a plurality of movable beam columns, and m...
- Patent number 10,026,588
- Issue date Jul 17, 2018
- Keysight Technologies, Inc.
- Kurt Stephen Werder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-voltage energy-dispersive spectroscopy using a low-voltage sca...
- Patent number 9,099,276
- Issue date Aug 4, 2015
- Keysight Technologies, Inc.
- Lawrence P. Muray
- G01 - MEASURING TESTING
Information Patent Grant
Layered scanning charged particle apparatus package having an embed...
- Patent number 8,115,168
- Issue date Feb 14, 2012
- Agilent Technologies, Inc.
- Lawrence P. Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Layered scanning charged particle microscope package for a charged...
- Patent number 8,110,801
- Issue date Feb 7, 2012
- Agilent Technologies, Inc.
- Scott W. Indermuehle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Layered scanning charged particle microscope with differential pump...
- Patent number 8,106,358
- Issue date Jan 31, 2012
- Agilent Technologies, Inc.
- James P. Spallas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated deflectors for beam alignment and blanking in charged pa...
- Patent number 8,003,952
- Issue date Aug 23, 2011
- Agilent Technologies, Inc.
- Lawrence P. Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked lens structure and method of use thereof for preventing ele...
- Patent number 7,335,895
- Issue date Feb 26, 2008
- Novelx, Inc.
- James Spallas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for multiple electron, ion, and photon beam align...
- Patent number 7,332,729
- Issue date Feb 19, 2008
- Novelx, Inc.
- Lawrence Muray
- G01 - MEASURING TESTING
Information Patent Grant
Layered electron beam column and method of use thereof
- Patent number 7,109,486
- Issue date Sep 19, 2006
- Novelx, Inc.
- James Spallas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked lens structure and method of use thereof for preventing ele...
- Patent number 7,045,794
- Issue date May 16, 2006
- Novelx, Inc.
- James Spallas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS structure with mechanical overdeflection limiter
- Patent number 6,805,454
- Issue date Oct 19, 2004
- Glimmerglass Networks, Inc.
- Bryan P. Staker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure with raised electrodes
- Patent number 6,791,742
- Issue date Sep 14, 2004
- Glimmerglass Networks, Inc.
- Bryan P. Staker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure with surface potential control
- Patent number 6,693,735
- Issue date Feb 17, 2004
- Glimmerglass Networks, Inc.
- Lawrence P. Muray
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure with mechanical overdeflection limiter
- Patent number 6,641,273
- Issue date Nov 4, 2003
- Glimmerglass Networks, Inc.
- Bryan P. Staker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High precision flexure stage
- Patent number 6,555,829
- Issue date Apr 29, 2003
- Applied Materials, Inc.
- James P. Spallas
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Integrated microcolumn and scanning probe microscope arrays
- Patent number 6,369,385
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Lawrence P. Muray
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrostatic alignment of a charged particle beam
- Patent number 6,288,401
- Issue date Sep 11, 2001
- Etec Systems, Inc.
- Tai-Hon P Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microcolumn assembly using laser spot welding
- Patent number 6,195,214
- Issue date Feb 27, 2001
- Etec Systems, Inc.
- Lawrence Peter Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectively scaling a field emission electron gun and de...
- Patent number 5,155,412
- Issue date Oct 13, 1992
- International Business Machines Corporation
- Tai-Hon P. Chang
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ENSEMBLE OF DEEP LEARNING MODELS FOR DEFECT REVIEW IN HIGH VOLUME M...
- Publication number 20240354925
- Publication date Oct 24, 2024
- KLA Corporation
- Kuljit S. Virk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTO-FOCUS SENSOR IMPLEMENTATION FOR MULTI-COLUMN MICROSCOPES
- Publication number 20240079203
- Publication date Mar 7, 2024
- KLA Corporation
- Nicholas Petrone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINIATURE ELECTRON OPTICAL COLUMN WITH A LARGE FIELD OF VIEW
- Publication number 20240014000
- Publication date Jan 11, 2024
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINIATURE HYBRID ELECTRON BEAM COLUMN
- Publication number 20230326704
- Publication date Oct 12, 2023
- KLA Corporation
- Lawrence Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEGMENTED MULTI-CHANNEL, BACKSIDE ILLUMINATED, SOLID STATE DETECTOR...
- Publication number 20220399220
- Publication date Dec 15, 2022
- KLA Corporation
- John Gerling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arrayed Column Detector
- Publication number 20210280386
- Publication date Sep 9, 2021
- KLA Corporation
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGING APPARATUS HAVING A PLURALITY OF MOVABLE BEAM COLUMNS, AND M...
- Publication number 20160064185
- Publication date Mar 3, 2016
- Keysight Technologies, Inc.
- Kurt Stephen Werder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-VOLTAGE ENERGY-DISPERSIVE SPECTROSCOPY USING A LOW-VOLTAGE SCA...
- Publication number 20150213995
- Publication date Jul 30, 2015
- Keysight Technologies, Inc.
- Lawrence P. Muray
- G01 - MEASURING TESTING
Information Patent Application
LAYERED SCANNING CHARGED PARTICLE APPARATUS PACKAGE HAVING AN EMBED...
- Publication number 20100224778
- Publication date Sep 9, 2010
- Lawrence P. Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYERED SCANNING CHARGED PARTICLE MICROSCOPE WITH DIFFERENTIAL PUMP...
- Publication number 20100224777
- Publication date Sep 9, 2010
- James P. Spallas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYERED SCANNING CHARGED PARTICLE MICROSCOPE PACKAGE FOR A CHARGED...
- Publication number 20100224779
- Publication date Sep 9, 2010
- Scott W. Indermuehle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED DEFLECTORS FOR BEAM ALIGNMENT AND BLANKING IN CHARGED PA...
- Publication number 20080217531
- Publication date Sep 11, 2008
- Lawrence P. Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF DETECTING SECONDARY ELECTRONS
- Publication number 20080054180
- Publication date Mar 6, 2008
- Charles Silver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS structure with raised electrodes
- Publication number 20040095629
- Publication date May 20, 2004
- GlimmerGlass Networks, Inc.
- Bryan P. Staker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS structure with mechanical overdeflection limiter
- Publication number 20040001263
- Publication date Jan 1, 2004
- GlimmerGlass Networks, Inc.
- Bryan P. Staker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Silicon on insulator standoff and method for manufacture thereof
- Publication number 20030197176
- Publication date Oct 23, 2003
- GlimmerGlass Networks, Inc.
- James P. Spallas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Optical signal transmission for electron beam imaging apparatus
- Publication number 20020145113
- Publication date Oct 10, 2002
- APPLIED MATERIALS, INC.
- Jeffrey Sullivan
- B82 - NANO-TECHNOLOGY

Lawrence P. Muray

Person

Patents Grantslast 30 patents

Ensemble of deep learning models for defect review in high volume m...

Segmented multi-channel, backside illuminated, solid state detector...

Defect inspection and review using transmissive current image of ch...

Arrayed column detector

Ultra-high sensitivity hybrid inspection with full wafer coverage c...

Array-based characterization tool

Imaging apparatus having a plurality of movable beam columns, and m...

High-voltage energy-dispersive spectroscopy using a low-voltage sca...

Layered scanning charged particle apparatus package having an embed...

Layered scanning charged particle microscope package for a charged...

Layered scanning charged particle microscope with differential pump...

Integrated deflectors for beam alignment and blanking in charged pa...

Stacked lens structure and method of use thereof for preventing ele...

System and method for multiple electron, ion, and photon beam align...

Layered electron beam column and method of use thereof

Stacked lens structure and method of use thereof for preventing ele...

MEMS structure with mechanical overdeflection limiter

MEMS structure with raised electrodes

MEMS structure with surface potential control

MEMS structure with mechanical overdeflection limiter

High precision flexure stage

Integrated microcolumn and scanning probe microscope arrays

Electrostatic alignment of a charged particle beam

Microcolumn assembly using laser spot welding

Method for selectively scaling a field emission electron gun and de...

Patents Applicationslast 30 patents

ENSEMBLE OF DEEP LEARNING MODELS FOR DEFECT REVIEW IN HIGH VOLUME M...

AUTO-FOCUS SENSOR IMPLEMENTATION FOR MULTI-COLUMN MICROSCOPES

MINIATURE ELECTRON OPTICAL COLUMN WITH A LARGE FIELD OF VIEW

MINIATURE HYBRID ELECTRON BEAM COLUMN

SEGMENTED MULTI-CHANNEL, BACKSIDE ILLUMINATED, SOLID STATE DETECTOR...

Arrayed Column Detector

IMAGING APPARATUS HAVING A PLURALITY OF MOVABLE BEAM COLUMNS, AND M...

HIGH-VOLTAGE ENERGY-DISPERSIVE SPECTROSCOPY USING A LOW-VOLTAGE SCA...

LAYERED SCANNING CHARGED PARTICLE APPARATUS PACKAGE HAVING AN EMBED...

LAYERED SCANNING CHARGED PARTICLE MICROSCOPE WITH DIFFERENTIAL PUMP...

LAYERED SCANNING CHARGED PARTICLE MICROSCOPE PACKAGE FOR A CHARGED...

INTEGRATED DEFLECTORS FOR BEAM ALIGNMENT AND BLANKING IN CHARGED PA...

APPARATUS AND METHOD OF DETECTING SECONDARY ELECTRONS

MEMS structure with raised electrodes

MEMS structure with mechanical overdeflection limiter

Silicon on insulator standoff and method for manufacture thereof

Optical signal transmission for electron beam imaging apparatus