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Wafer coating system
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Patent number 5,281,320
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Issue date Jan 25, 1994
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Varian Associates Inc.
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Frederick T. Turner
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer coating system
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Patent number 5,024,747
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Issue date Jun 18, 1991
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Varian Associates, Inc.
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Frederick T. Turner
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer coating system
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Patent number 4,756,815
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Issue date Jul 12, 1988
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Varian Associates, Inc.
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Frederick T. Turner
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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