Laxman Murugesh

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Printing chemical mechanical polishing pad having window or control...
- Patent number 11,007,618
- Issue date May 18, 2021
- Applied Materials, Inc.
- Laxman Murugesh
- B24 - GRINDING POLISHING
Information Patent Grant
Printed chemical mechanical polishing pad having printed window
- Patent number 9,993,907
- Issue date Jun 12, 2018
- Applied Materials, Inc.
- Laxman Murugesh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Surface annealing of components for substrate processing chambers
- Patent number 9,481,608
- Issue date Nov 1, 2016
- Applied Materials, Inc.
- Ashish Bhatnagar
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Localized surface annealing of components for substrate processing...
- Patent number 8,617,672
- Issue date Dec 31, 2013
- Applied Materials, Inc.
- Ashish Bhatnagar
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Corrosion-resistant aluminum component having multi-layer coating
- Patent number 7,732,056
- Issue date Jun 8, 2010
- Applied Materials, Inc.
- Ashish Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distributor having directed gas flow and cleaning method
- Patent number 7,431,772
- Issue date Oct 7, 2008
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Erosion resistant process chamber components
- Patent number 7,135,426
- Issue date Nov 14, 2006
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process endpoint detection in processing chambers
- Patent number 6,878,214
- Issue date Apr 12, 2005
- Applied Materials, Inc.
- Laxman Murugesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for modifying the profile of narrow, high-aspe...
- Patent number 6,579,811
- Issue date Jun 17, 2003
- Applied Materials Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Directing a flow of gas in a substrate processing chamber
- Patent number 6,450,117
- Issue date Sep 17, 2002
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential in-situ heating and deposition of halogen-doped silicon...
- Patent number 6,375,744
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential in-situ heating and deposition of halogen-doped silicon...
- Patent number 6,228,781
- Issue date May 8, 2001
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequencing of the recipe steps for the optimal low-dielectric const...
- Patent number 6,217,658
- Issue date Apr 17, 2001
- Applied Materials, Inc.
- Maciek Orczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for modifying the profile of narrow, high-aspe...
- Patent number 6,200,911
- Issue date Mar 13, 2001
- Applied Materials, Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system configurable for deposition or cleaning
- Patent number 6,159,333
- Issue date Dec 12, 2000
- Applied Materials, Inc.
- Anand Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High deposition rate recipe for low dielectric constant films
- Patent number 6,136,685
- Issue date Oct 24, 2000
- Applied Materials, Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant apparatus
- Patent number 5,997,685
- Issue date Dec 7, 1999
- Applied Materials, Inc.
- Charles K. Radhamohan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Unique baffle to deflect remote plasma clean gases
- Patent number 5,994,662
- Issue date Nov 30, 1999
- Applied Materials, Inc.
- Laxman Murugesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequencing of the recipe steps for the optimal low-k HDP-CVD proces...
- Patent number 5,937,323
- Issue date Aug 10, 1999
- Applied Materials, Inc.
- Maciek Orczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduction in mobile ion and metal contamination by varying season t...
- Patent number 5,811,356
- Issue date Sep 22, 1998
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Using ceramic wafer to protect susceptor during cleaning of a proce...
- Patent number 5,810,937
- Issue date Sep 22, 1998
- Applied Materials, Inc.
- Anand Gupta
- B08 - CLEANING
Information Patent Grant
Corrosion-resistant aluminum article for semiconductor processing e...
- Patent number 5,811,195
- Issue date Sep 22, 1998
- Applied Materials, Inc.
- Craig Bercaw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant aluminum article for semiconductor processing e...
- Patent number 5,756,222
- Issue date May 26, 1998
- Applied Materials, Inc.
- Craig A. Bercaw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PRINTING CHEMICAL MECHANICAL POLISHING PAD HAVING WINDOW OR CONTROL...
- Publication number 20210245322
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Laxman Murugesh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PRINTING CHEMICAL MECHANICAL POLISHING PAD HAVING WINDOW OR CONTROL...
- Publication number 20180236632
- Publication date Aug 23, 2018
- Laxman Murugesh
- B24 - GRINDING POLISHING
Information Patent Application
PRINTED CHEMICAL MECHANICAL POLISHING PAD HAVING CONTROLLED POROSITY
- Publication number 20150174826
- Publication date Jun 25, 2015
- Applied Materials, Inc.
- Laxman Murugesh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SURFACE ANNEALING OF COMPONENTS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20140167327
- Publication date Jun 19, 2014
- Applied Materials, Inc.
- Ashish Bhatnagar
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Two-Part Plastic Retaining Ring
- Publication number 20130035022
- Publication date Feb 7, 2013
- Young J. Paik
- B24 - GRINDING POLISHING
Information Patent Application
Chamber components with polymer coatings and methods of manufacture
- Publication number 20070108161
- Publication date May 17, 2007
- APPLIED MATERIALS, INC.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Localized surface annealing of components for substrate processing...
- Publication number 20070014949
- Publication date Jan 18, 2007
- APPLIED MATERIALS, INC.
- Ashish Bhatnagar
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Corrosion-resistant aluminum component having multi-layer coating
- Publication number 20060159940
- Publication date Jul 20, 2006
- APPLIED MATERIALS, INC.
- Ashish Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chamber component having grooved surface with depressions
- Publication number 20050284372
- Publication date Dec 29, 2005
- APPLIED MATERIALS, INC.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Erosion resistant process chamber components
- Publication number 20050274320
- Publication date Dec 15, 2005
- APPLIED MATERIALS, INC.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas distributor having directed gas flow and cleaning method
- Publication number 20050199184
- Publication date Sep 15, 2005
- APPLIED MATERIALS, INC.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas nozzle for substrate processing chamber
- Publication number 20040129210
- Publication date Jul 8, 2004
- APPLIED MATERIALS, INC.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for modifying the profile of narrow, high-aspe...
- Publication number 20030157812
- Publication date Aug 21, 2003
- Applied Materials, Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process endpoint detection in processing chambers
- Publication number 20030136425
- Publication date Jul 24, 2003
- APPLIED MATERIALS, INC.
- Laxman Murugesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sequential in-situ heating and deposition of halogen-doped silicon...
- Publication number 20010020447
- Publication date Sep 13, 2001
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for modifying the profile of narrow, high-aspe...
- Publication number 20010001175
- Publication date May 17, 2001
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Laxman Murugesh

Person

Patents Grantslast 30 patents

Printing chemical mechanical polishing pad having window or control...

Printed chemical mechanical polishing pad having printed window

Surface annealing of components for substrate processing chambers

Localized surface annealing of components for substrate processing...

Corrosion-resistant aluminum component having multi-layer coating

Gas distributor having directed gas flow and cleaning method

Erosion resistant process chamber components

Process endpoint detection in processing chambers

Method and apparatus for modifying the profile of narrow, high-aspe...

Directing a flow of gas in a substrate processing chamber

Sequential in-situ heating and deposition of halogen-doped silicon...

Sequential in-situ heating and deposition of halogen-doped silicon...

Sequencing of the recipe steps for the optimal low-dielectric const...

Method and apparatus for modifying the profile of narrow, high-aspe...

Substrate processing system configurable for deposition or cleaning

High deposition rate recipe for low dielectric constant films

Corrosion-resistant apparatus

Unique baffle to deflect remote plasma clean gases

Sequencing of the recipe steps for the optimal low-k HDP-CVD proces...

Reduction in mobile ion and metal contamination by varying season t...

Using ceramic wafer to protect susceptor during cleaning of a proce...

Corrosion-resistant aluminum article for semiconductor processing e...

Corrosion-resistant aluminum article for semiconductor processing e...

Patents Applicationslast 30 patents

PRINTING CHEMICAL MECHANICAL POLISHING PAD HAVING WINDOW OR CONTROL...

PRINTING CHEMICAL MECHANICAL POLISHING PAD HAVING WINDOW OR CONTROL...

PRINTED CHEMICAL MECHANICAL POLISHING PAD HAVING CONTROLLED POROSITY

SURFACE ANNEALING OF COMPONENTS FOR SUBSTRATE PROCESSING CHAMBERS

Two-Part Plastic Retaining Ring

Chamber components with polymer coatings and methods of manufacture

Localized surface annealing of components for substrate processing...

Corrosion-resistant aluminum component having multi-layer coating

Chamber component having grooved surface with depressions

Erosion resistant process chamber components

Gas distributor having directed gas flow and cleaning method

Gas nozzle for substrate processing chamber

Method and apparatus for modifying the profile of narrow, high-aspe...

Process endpoint detection in processing chambers

Sequential in-situ heating and deposition of halogen-doped silicon...

Method and apparatus for modifying the profile of narrow, high-aspe...