Layton Hale

Person

Castro Valley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High bandwidth binary multi-leaf collimator design
- Patent number 11,878,185
- Issue date Jan 23, 2024
- RefleXion Medical, Inc.
- Eugene Duval
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
High bandwidth binary multi-leaf collimator design
- Patent number 11,285,340
- Issue date Mar 29, 2022
- RefleXion Medical, Inc.
- David Larkin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
High bandwidth binary multi-leaf collimator design
- Patent number 10,500,416
- Issue date Dec 10, 2019
- RefleXion Medical, Inc.
- David Larkin
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Linear Stage for reflective electron beam lithography
- Patent number 9,690,213
- Issue date Jun 27, 2017
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System and method for generation of extreme ultraviolet light
- Patent number 9,544,984
- Issue date Jan 10, 2017
- KLA-Tencor Corporation
- Alexander Bykanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer stage with reciprocating wafer stage actuation control
- Patent number 9,298,106
- Issue date Mar 29, 2016
- KLA-Tencor Corporation
- Upendra Ummethala
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Continuous generation of extreme ultraviolet light
- Patent number 8,963,110
- Issue date Feb 24, 2015
- KLA-Tencor Corporation
- Layton Hale
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Linear stage and metrology architecture for reflective electron bea...
- Patent number 8,724,115
- Issue date May 13, 2014
- KLA-Tencor Corporation
- Upendra Ummethala
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN
- Publication number 20240198136
- Publication date Jun 20, 2024
- RefleXion Medical, Inc.
- David LARKIN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN
- Publication number 20220193451
- Publication date Jun 23, 2022
- RefleXion Medical, Inc.
- Eugene DUVAL
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN
- Publication number 20200164230
- Publication date May 28, 2020
- RefleXion Medical, Inc.
- David LARKIN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Droplet Generation for a Laser Produced Plasma Light Source
- Publication number 20170131129
- Publication date May 11, 2017
- KLA-Tencor Corporation
- Brian Ahr
- G01 - MEASURING TESTING
Information Patent Application
HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN
- Publication number 20160361566
- Publication date Dec 15, 2016
- RefleXion Medical, Inc.
- David LARKIN
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
System and Method for Generation of Extreme Ultraviolet Light
- Publication number 20150076359
- Publication date Mar 19, 2015
- KLA-Tencor Corporation
- Alexander Bykanov
- G01 - MEASURING TESTING
Information Patent Application
Continuous Generation of Extreme Ultraviolet Light
- Publication number 20140374611
- Publication date Dec 25, 2014
- Layton Hale
- G01 - MEASURING TESTING
Information Patent Application
Linear Stage and Metrology Architecture for Reflective Electron Bea...
- Publication number 20130342827
- Publication date Dec 26, 2013
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Application
Linear Stage for Reflective Electron Beam Lithography
- Publication number 20130293865
- Publication date Nov 7, 2013
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Application
Heat Removal From Substrates In Vacuum
- Publication number 20130105108
- Publication date May 2, 2013
- KLA-Tencor Corporation
- Marek Zywno
- H01 - BASIC ELECTRIC ELEMENTS

Layton Hale

Person

Patents Grantslast 30 patents

High bandwidth binary multi-leaf collimator design

High bandwidth binary multi-leaf collimator design

High bandwidth binary multi-leaf collimator design

Linear Stage for reflective electron beam lithography

System and method for generation of extreme ultraviolet light

Wafer stage with reciprocating wafer stage actuation control

Continuous generation of extreme ultraviolet light

Linear stage and metrology architecture for reflective electron bea...

Patents Applicationslast 30 patents

HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN

HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN

HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN

Droplet Generation for a Laser Produced Plasma Light Source

HIGH BANDWIDTH BINARY MULTI-LEAF COLLIMATOR DESIGN

System and Method for Generation of Extreme Ultraviolet Light

Continuous Generation of Extreme Ultraviolet Light

Linear Stage and Metrology Architecture for Reflective Electron Bea...

Linear Stage for Reflective Electron Beam Lithography

Heat Removal From Substrates In Vacuum