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Tainan, TW
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Patents Grants
last 30 patents
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Patent Grant
Method for protecting a wafer backside from etching damage
Patent number
6,777,334
Issue date
Aug 17, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Le Der Shiu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for protecting a wafer backside from etching damage
Publication number
20040018732
Publication date
Jan 29, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Le Der Shiu
H01 - BASIC ELECTRIC ELEMENTS