Lee A. Berry

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Oak Ridge, TN, US

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Patents Grantslast 30 patents

Information Patent Grant
Optimized ECR plasma apparatus with varied microwave window thickness
- Patent number 5,466,991
- Issue date Nov 14, 1995
- Sematech, Inc.
- Lee A. Berry
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
ECR apparatus with magnetic coil for plasma refractive index control
- Patent number 5,306,985
- Issue date Apr 26, 1994
- Sematech, Inc.
- Lee A. Berry
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Plasma generating apparatus for large area plasma processing
- Patent number 5,032,202
- Issue date Jul 16, 1991
- Martin Marietta Energy Systems, Inc.
- Chin-Chi Tsai
- H01 - BASIC ELECTRIC ELEMENTS