Lee-Chuan Tseng

Person

New Taipei City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
- Patent number 12,272,585
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sonar sensor in processing chamber
- Patent number 12,136,556
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric sidewall structure for quality improvement in Ge and SiG...
- Patent number 12,094,989
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ming Chen
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Process and related device for removing by-product on semiconductor...
- Patent number 12,027,350
- Issue date Jul 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jing-Cheng Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for mapping wafers in a wafer carrier
- Patent number 11,996,308
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of making
- Patent number 11,921,325
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Chen Chen
- G02 - OPTICS
Information Patent Grant
Dielectric sidewall structure for quality improvement in Ge and SiG...
- Patent number 11,749,763
- Issue date Sep 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and related device for removing by-product on semiconductor...
- Patent number 11,710,622
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jing-Cheng Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method of making
- Patent number 11,675,129
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Chen Chen
- G02 - OPTICS
Information Patent Grant
Comb electrode release process for MEMS structure
- Patent number 11,661,337
- Issue date May 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented pedestal for mounting device on chip
- Patent number 11,542,153
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low contamination chamber for surface activation
- Patent number 11,508,562
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Yin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor structure and method for fabricating the same
- Patent number 11,434,129
- Issue date Sep 6, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ion beam etching chamber with etching by-product redistributor
- Patent number 11,239,060
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for real time monitoring semiconductor fabrication process
- Patent number 11,183,391
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Lee-Chuan Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor arrangement and formation thereof
- Patent number 11,167,982
- Issue date Nov 9, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-Yen Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented pedestal for mounting device on chip
- Patent number 11,084,715
- Issue date Aug 10, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dielectric sidewall structure for quality improvement in GE and SIG...
- Patent number 10,896,985
- Issue date Jan 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Ming Chen
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
High efficiency getter design in vacuum MEMS device
- Patent number 10,875,764
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned double patterning (SADP) method
- Patent number 10,872,777
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jui-Yu Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process and related device for removing by-product on semiconductor...
- Patent number 10,784,091
- Issue date Sep 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jing-Cheng Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor arrangement and formation thereof
- Patent number 10,683,204
- Issue date Jun 16, 2020
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-Yen Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High efficiency getter design in vacuum MEMS device
- Patent number 10,526,199
- Issue date Jan 7, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,522,429
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned double patterning (SADP) method
- Patent number 10,483,119
- Issue date Nov 19, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Yu Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor arrangement and formation thereof
- Patent number 10,322,930
- Issue date Jun 18, 2019
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-Yen Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,273,143
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20240379400
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SONAR SENSOR IN PROCESSING CHAMBER
- Publication number 20240371668
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC SIDEWALL STRUCTURE FOR QUALITY IMPROVEMENT IN GE AND SIG...
- Publication number 20240363777
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND RELATED DEVICE FOR REMOVING BY-PRODUCT ON SEMICONDUCTOR...
- Publication number 20240331988
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jing-Cheng Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MAPPING WAFERS IN A WAFER CARRIER
- Publication number 20240266196
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
- Publication number 20240210624
- Publication date Jun 27, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Chen CHEN
- G02 - OPTICS
Information Patent Application
TRENCH CAPACITOR STRUCTURE AND METHODS OF MANUFACTURING
- Publication number 20240096930
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCH STOP STRUCTURE FOR IC TO INCREASE STABILITY AND ENDURANCE
- Publication number 20240021513
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Chang Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR
- Publication number 20230369024
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC SIDEWALL STRUCTURE FOR QUALITY IMPROVEMENT IN GE AND SIG...
- Publication number 20230369521
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE
- Publication number 20230249964
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SONAR SENSOR IN PROCESSING CHAMBER
- Publication number 20230019109
- Publication date Jan 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
- Publication number 20220373740
- Publication date Nov 24, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Chen CHEN
- G02 - OPTICS
Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20220344193
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Jung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20220315414
- Publication date Oct 6, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MAPPING WAFERS IN A WAFER CARRIER
- Publication number 20220285186
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR
- Publication number 20220148856
- Publication date May 12, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE
- Publication number 20220119247
- Publication date Apr 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
- Publication number 20210331915
- Publication date Oct 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
- Publication number 20210271024
- Publication date Sep 2, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Chen CHEN
- G02 - OPTICS
Information Patent Application
DIELECTRIC SIDEWALL STRUCTURE FOR QUALITY IMPROVEMENT IN GE AND SIG...
- Publication number 20210167236
- Publication date Jun 3, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Ming Chen
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD FOR REAL TIME MONITORING SEMICONDUCTOR FABRICATION PROCESS
- Publication number 20210125835
- Publication date Apr 29, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND RELATED DEVICE FOR REMOVING BY-PRODUCT ON SEMICONDUCTOR...
- Publication number 20200402779
- Publication date Dec 24, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jing-Cheng Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS AND RELATED DEVICE FOR REMOVING BY-PRODUCT ON SEMICONDUCTOR...
- Publication number 20200395200
- Publication date Dec 17, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jing-Cheng Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
- Publication number 20200369515
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF
- Publication number 20200307993
- Publication date Oct 1, 2020
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-Yen Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH EFFICIENCY GETTER DESIGN IN VACUUM MEMS DEVICE
- Publication number 20200102215
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED DOUBLE PATTERNING (SADP) METHOD
- Publication number 20200098580
- Publication date Mar 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Yu Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF
- Publication number 20190367358
- Publication date Dec 5, 2019
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-Yen Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Lee-Chuan Tseng

Person

Patents Grantslast 30 patents

Wafer chuck structure with holes in upper surface to improve temper...

Sonar sensor in processing chamber

Dielectric sidewall structure for quality improvement in Ge and SiG...

Process and related device for removing by-product on semiconductor...

Method for mapping wafers in a wafer carrier

Semiconductor device and method of making

Dielectric sidewall structure for quality improvement in Ge and SiG...

Process and related device for removing by-product on semiconductor...

Semiconductor device and method of making

Comb electrode release process for MEMS structure

Segmented pedestal for mounting device on chip

Low contamination chamber for surface activation

Semiconductor structure and method for fabricating the same

Fence structure to prevent stiction in a MEMS motion sensor

Ion beam etching chamber with etching by-product redistributor

Method for real time monitoring semiconductor fabrication process

Semiconductor arrangement and formation thereof

Segmented pedestal for mounting device on chip

Dielectric sidewall structure for quality improvement in GE and SIG...

High efficiency getter design in vacuum MEMS device

Self-aligned double patterning (SADP) method

Method and apparatus for reducing in-process and in-use stiction fo...

Process and related device for removing by-product on semiconductor...

Semiconductor arrangement and formation thereof

Fence structure to prevent stiction in a MEMS motion sensor

High efficiency getter design in vacuum MEMS device

Method of manufacturing semiconductor device

Self-aligned double patterning (SADP) method

Semiconductor arrangement and formation thereof

Method and apparatus for reducing in-process and in-use stiction fo...

Patents Applicationslast 30 patents

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

SONAR SENSOR IN PROCESSING CHAMBER

DIELECTRIC SIDEWALL STRUCTURE FOR QUALITY IMPROVEMENT IN GE AND SIG...

PROCESS AND RELATED DEVICE FOR REMOVING BY-PRODUCT ON SEMICONDUCTOR...

METHOD FOR MAPPING WAFERS IN A WAFER CARRIER

SEMICONDUCTOR DEVICE AND METHOD OF MAKING

TRENCH CAPACITOR STRUCTURE AND METHODS OF MANUFACTURING

ETCH STOP STRUCTURE FOR IC TO INCREASE STABILITY AND ENDURANCE

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

DIELECTRIC SIDEWALL STRUCTURE FOR QUALITY IMPROVEMENT IN GE AND SIG...

COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE

SONAR SENSOR IN PROCESSING CHAMBER

SEMICONDUCTOR DEVICE AND METHOD OF MAKING

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

METHOD FOR MAPPING WAFERS IN A WAFER CARRIER

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE

SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP

SEMICONDUCTOR DEVICE AND METHOD OF MAKING

DIELECTRIC SIDEWALL STRUCTURE FOR QUALITY IMPROVEMENT IN GE AND SIG...

METHOD FOR REAL TIME MONITORING SEMICONDUCTOR FABRICATION PROCESS

PROCESS AND RELATED DEVICE FOR REMOVING BY-PRODUCT ON SEMICONDUCTOR...

PROCESS AND RELATED DEVICE FOR REMOVING BY-PRODUCT ON SEMICONDUCTOR...

SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP

SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

HIGH EFFICIENCY GETTER DESIGN IN VACUUM MEMS DEVICE

SELF-ALIGNED DOUBLE PATTERNING (SADP) METHOD

SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF