Lee Haen

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Phoenix, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 8,088,225
- Issue date Jan 3, 2012
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 7,648,579
- Issue date Jan 19, 2010
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSI...
- Publication number 20100089314
- Publication date Apr 15, 2010
- ASM AMERICA, INC
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate support system for reduced autodoping and backside deposi...
- Publication number 20050193952
- Publication date Sep 8, 2005
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS