Lei MA

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck device, pressure calculation method and program
- Patent number 12,327,750
- Issue date Jun 10, 2025
- Horiba Stec, Co., Ltd.
- Lei Ma
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK DEVICE, PRESSURE CALCULATION METHOD AND PROGRAM
- Publication number 20230274966
- Publication date Aug 31, 2023
- HORIBA STEC, CO., LTD.
- Lei MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID RESISTANCE ELEMENT AND FLUID CONTROL DEVICE
- Publication number 20220413522
- Publication date Dec 29, 2022
- HORIBA STEC, CO., LTD.
- Tadahiro YASUDA
- G05 - CONTROLLING REGULATING