Lei Wan

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma process apparatus with low particle contamination and method...
- Patent number 11,371,141
- Issue date Jun 28, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating packaged chamber parts for semiconductor plasma apparatus
- Patent number 9,951,435
- Issue date Apr 24, 2018
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating packaged chamber parts for semiconductor plasma apparatus
- Patent number 9,617,633
- Issue date Apr 11, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESS APPARATUS WITH LOW PARTICLE CONTAMINATION AND METHOD...
- Publication number 20190194802
- Publication date Jun 27, 2019
- Advanced Micro-Fabrication Equipment Inc, China
- Tuqiang NI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS
- Publication number 20170241038
- Publication date Aug 24, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming HE
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS THEREOF
- Publication number 20170154780
- Publication date Jun 1, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Ping Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS
- Publication number 20140120312
- Publication date May 1, 2014
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING PACKAGED SHOWERHEAD PERFORMANCE ENHANCEMENT FOR SEMICONDUCT...
- Publication number 20140117120
- Publication date May 1, 2014
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Plasma process apparatus with low particle contamination and method...

Coating packaged chamber parts for semiconductor plasma apparatus

Coating packaged chamber parts for semiconductor plasma apparatus

Patents Applicationslast 30 patents

PLASMA PROCESS APPARATUS WITH LOW PARTICLE CONTAMINATION AND METHOD...

COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS

SUBSTRATE PROCESSING METHOD AND APPARATUS THEREOF

COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS

COATING PACKAGED SHOWERHEAD PERFORMANCE ENHANCEMENT FOR SEMICONDUCT...