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Lei WANG
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Los Gatos, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Instant tuning method for accelerating resist and etch model calibr...
Patent number
11,314,172
Issue date
Apr 26, 2022
ASML Netherlands B.V.
Hongfei Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PREDICTION DATA SELECTION FOR MODEL CALIBRATION TO REDUCE MODEL PRE...
Publication number
20220276563
Publication date
Sep 1, 2022
ASML NETHERLANDS B.V.
Lei WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GAUGE SELECTION FOR MODEL CALIBRATION
Publication number
20220113632
Publication date
Apr 14, 2022
ASML NETHERLANDS B.V.
Lei WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSTANT TUNING METHOD FOR ACCELERATING RESIST AND ETCH MODEL CALIBR...
Publication number
20210048751
Publication date
Feb 18, 2021
ASML NETHERLANDS B.V.
Hongfei SHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY