Leif Keto

Person

Kauniainen, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Method for coating a substrate
- Patent number 10,513,776
- Issue date Dec 24, 2019
- Beneq Oy
- Leif Keto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing two or more substrates in a batch process
- Patent number 10,273,579
- Issue date Apr 30, 2019
- Beneq Oy
- Leif Keto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing a coating to a surface of a subs...
- Patent number 10,214,813
- Issue date Feb 26, 2019
- Beneq Oy
- Leif Keto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing surface of substrate and nozzle head
- Patent number 9,683,291
- Issue date Jun 20, 2017
- Beneq Oy
- Robin Enholm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for fabrication of thin films
- Patent number 7,833,352
- Issue date Nov 16, 2010
- ASM International N.V
- Niklas Bondestam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for fabrication of thin films
- Patent number 6,579,374
- Issue date Jun 17, 2003
- ASM Microchemistry Oy
- Niklas Bondestam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for fabrication of thin films
- Patent number 6,562,140
- Issue date May 13, 2003
- ASM Microchemistry Oy
- Niklas Bondestam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR COATING SUBSTRATE
- Publication number 20190186010
- Publication date Jun 20, 2019
- BENEQ OY
- Leif Keto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING A SURFACE OF SUBSTRATE AND METHOD OPERATIN...
- Publication number 20180258536
- Publication date Sep 13, 2018
- BENEQ OY
- Leif Keto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PROVIDING A COATING TO A SURFACE OF A SUBS...
- Publication number 20180237913
- Publication date Aug 23, 2018
- BENEQ OY
- Leif Keto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING TWO OR MORE SUBSTRATES IN A BATCH PROCESS
- Publication number 20160281228
- Publication date Sep 29, 2016
- BENEQ OY
- Leif KETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SURFACE OF SUBSTRATE AND NOZZLE HEAD
- Publication number 20150152552
- Publication date Jun 4, 2015
- BENEQ OY
- Robin Enholm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION REACTOR
- Publication number 20130263783
- Publication date Oct 10, 2013
- Leif R. Keto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD REACTOR
- Publication number 20090255470
- Publication date Oct 15, 2009
- Beneq Oy
- Pekka Soininen
- C30 - CRYSTAL GROWTH
Information Patent Application
ATOMIC LAYER DEPOSITION REACTOR
- Publication number 20080241387
- Publication date Oct 2, 2008
- ASM INTERNATIONAL N.V.
- Leif R. Keto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for fabrication of thin films
- Publication number 20030150385
- Publication date Aug 14, 2003
- Niklas Bondestam
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus for fabrication of thin films
- Publication number 20010009140
- Publication date Jul 26, 2001
- Niklas Bondestam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method for coating a substrate

Apparatus for processing two or more substrates in a batch process

Apparatus and method for providing a coating to a surface of a subs...

Apparatus for processing surface of substrate and nozzle head

Apparatus for fabrication of thin films

Apparatus for fabrication of thin films

Apparatus for fabrication of thin films

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR COATING SUBSTRATE

APPARATUS FOR PROCESSING A SURFACE OF SUBSTRATE AND METHOD OPERATIN...

APPARATUS AND METHOD FOR PROVIDING A COATING TO A SURFACE OF A SUBS...

APPARATUS FOR PROCESSING TWO OR MORE SUBSTRATES IN A BATCH PROCESS

APPARATUS FOR PROCESSING SURFACE OF SUBSTRATE AND NOZZLE HEAD

ATOMIC LAYER DEPOSITION REACTOR

ALD REACTOR

ATOMIC LAYER DEPOSITION REACTOR

Apparatus for fabrication of thin films

Apparatus for fabrication of thin films