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Shanghai, CN
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last 30 patents
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Patent Grant
Ion implantation method and ion implanter for performing the same
Patent number
11,482,401
Issue date
Oct 25, 2022
Shanghai Huali Integrated Circuit Mfg. Co. Ltd.
Chaorong Lai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER FOR PERFORMING THE SAME
Publication number
20200388465
Publication date
Dec 10, 2020
Shanghai Huali Integrated Circuit Mfg. Co., Ltd.
Chaorong Lai
H01 - BASIC ELECTRIC ELEMENTS