Leijie Wang

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Laser interference photolithography system
- Patent number 12,038,690
- Issue date Jul 16, 2024
- Tsinghua University
- Leijie Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plane grating calibration system
- Patent number 11,940,349
- Issue date Mar 26, 2024
- Tsinghua University
- Leijie Wang
- G01 - MEASURING TESTING
Information Patent Grant
Five-degree-of-freedom heterodyne grating interferometry system
- Patent number 11,703,361
- Issue date Jul 18, 2023
- BEIJING U-PRECISION TECH CO., LTD.
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Five-degree-of-freedom heterodyne grating interferometry system
- Patent number 11,525,673
- Issue date Dec 13, 2022
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Two-degree-of-freedom heterodyne grating interferometry measurement...
- Patent number 11,307,018
- Issue date Apr 19, 2022
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Three-DOF heterodyne grating interferometer displacement measuremen...
- Patent number 9,903,704
- Issue date Feb 27, 2018
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Dual-frequency grating interferometer displacement measurement system
- Patent number 9,885,556
- Issue date Feb 6, 2018
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Heterodyne grating interferometer displacement measurement system
- Patent number 9,879,979
- Issue date Jan 30, 2018
- Tsinghua University
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Optical grating phase modulator for laser interference photoetching...
- Patent number 9,869,857
- Issue date Jan 16, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
- Publication number 20240319619
- Publication date Sep 26, 2024
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM
- Publication number 20240264534
- Publication date Aug 8, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...
- Publication number 20240061352
- Publication date Feb 22, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM
- Publication number 20240053683
- Publication date Feb 15, 2024
- Tsinghua University
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRAC...
- Publication number 20230366667
- Publication date Nov 16, 2023
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...
- Publication number 20230280658
- Publication date Sep 7, 2023
- TSINGHUA UNIVERSITY
- Leijie WANG
- G01 - MEASURING TESTING
Information Patent Application
PLANE GRATING CALIBRATION SYSTEM
- Publication number 20220260452
- Publication date Aug 18, 2022
- TSINGHUA UNIVERSITY
- Leijie WANG
- G01 - MEASURING TESTING
Information Patent Application
Five-degree-of-freedom heterodyne grating interferometry system
- Publication number 20220042792
- Publication date Feb 10, 2022
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
FIVE-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY SYSTEM
- Publication number 20210262834
- Publication date Aug 26, 2021
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G01 - MEASURING TESTING
Information Patent Application
TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...
- Publication number 20210164772
- Publication date Jun 3, 2021
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
THREE-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMEN...
- Publication number 20160153764
- Publication date Jun 2, 2016
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT...
- Publication number 20160138903
- Publication date May 19, 2016
- TSINGHUA UNIVERSITY
- Ming ZHANG
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING...
- Publication number 20150362723
- Publication date Dec 17, 2015
- TSINGHUA UNIVERSITY
- Yu Zhu
- G02 - OPTICS
Information Patent Application
HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM
- Publication number 20150338205
- Publication date Nov 26, 2015
- TSINGHUA UNIVERSITY
- Ming Zhang
- G01 - MEASURING TESTING
Information Patent Application
DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM
- Publication number 20150268031
- Publication date Sep 24, 2015
- TSINGHUA UNIVERSITY
- Yu Zhu
- G01 - MEASURING TESTING

Leijie Wang

Person

Patents Grantslast 30 patents

Laser interference photolithography system

Plane grating calibration system

Five-degree-of-freedom heterodyne grating interferometry system

Five-degree-of-freedom heterodyne grating interferometry system

Two-degree-of-freedom heterodyne grating interferometry measurement...

Three-DOF heterodyne grating interferometer displacement measuremen...

Dual-frequency grating interferometer displacement measurement system

Heterodyne grating interferometer displacement measurement system

Optical grating phase modulator for laser interference photoetching...

Patents Applicationslast 30 patents

PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...

SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM

EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...

LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM

HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRAC...

DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...

PLANE GRATING CALIBRATION SYSTEM

Five-degree-of-freedom heterodyne grating interferometry system

FIVE-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY SYSTEM

TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...

THREE-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMEN...

TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT...

OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING...

HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM

DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM