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Lena Zavyalova
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Austin, TX, US
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last 30 patents
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Patent Grant
Modeling EUV lithography shadowing effect
Patent number
8,601,404
Issue date
Dec 3, 2013
Synopsys, Inc.
Hua Song
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
MODELING EUV LITHOGRAPHY SHADOWING EFFECT
Publication number
20120240086
Publication date
Sep 20, 2012
Synopsys, Inc.
Hua Song
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY