Lena Zavyalova

Person

  • Austin, TX, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    MODELING EUV LITHOGRAPHY SHADOWING EFFECT

    • Publication number 20120240086
    • Publication date Sep 20, 2012
    • Synopsys, Inc.
    • Hua Song
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY