Leo V. Klos, Jr.

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Newburyport, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Indirectly heated cathode ion source
- Patent number 7,138,768
- Issue date Nov 21, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Peter E. Maciejowski
- H01 - BASIC ELECTRIC ELEMENTS