Leo V. KLOS

Person

Newburyport, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Indirectly heated cathode cartridge design
- Patent number 9,076,625
- Issue date Jul 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Craig Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of an extraction aperture of an ion source
- Patent number 8,455,839
- Issue date Jun 4, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of an extraction aperture of an ion source
- Patent number 8,071,956
- Issue date Dec 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- B08 - CLEANING
Information Patent Grant
Apparatus and system for controlling ion ribbon beam uniformity in...
- Patent number 8,049,192
- Issue date Nov 1, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Neil J. Bassom
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Technique for improving performance and extending lifetime of indir...
- Patent number 7,491,947
- Issue date Feb 17, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Eric R. Cobb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode assembly for indirectly heated cathode ion source
- Patent number 7,276,847
- Issue date Oct 2, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source arc chamber for ion implanter having repeller electrode moun...
- Patent number 7,102,139
- Issue date Sep 5, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for alignment of ion beam systems using beam...
- Patent number 6,403,972
- Issue date Jun 11, 2002
- Varian Semiconductor Equipment Associates, Inc.
- Antonella Cucchetti
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged particle beam system having beam-defining slit formed by ro...
- Patent number 5,629,528
- Issue date May 13, 1997
- Varian Associates, Inc.
- Jonathan A. Jost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid flow sensor with flexible vane
- Patent number 4,931,776
- Issue date Jun 5, 1990
- Varian Associates, Inc.
- Leo V. Klos
- G01 - MEASURING TESTING
Information Patent Grant
Low deflection force sensitive pick
- Patent number 4,744,709
- Issue date May 17, 1988
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple wafer holder for a wafer transfer system
- Patent number 4,602,713
- Issue date Jul 29, 1986
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INDIRECTLY HEATED CATHODE CARTRIDGE DESIGN
- Publication number 20120256097
- Publication date Oct 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING OF AN EXTRACTION APERTURE OF AN ION SOURCE
- Publication number 20110220812
- Publication date Sep 15, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. CHANEY
- B08 - CLEANING
Information Patent Application
CLEANING OF AN EXTRACTION APERTURE OF AN ION SOURCE
- Publication number 20110220144
- Publication date Sep 15, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. CHANEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM FOR CONTROLLING ION RIBBON BEAM UNIFORMITY IN...
- Publication number 20110155929
- Publication date Jun 30, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Neil J. Bassom
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Technique for improving performance and extending lifetime of induc...
- Publication number 20070085021
- Publication date Apr 19, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Eric R. Cobb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOURCE ARC CHAMBER FOR ION IMPLANTER HAVING REPELLER ELECTRODE MOUN...
- Publication number 20060163489
- Publication date Jul 27, 2006
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Indirectly heated cathode ion source
- Publication number 20030218428
- Publication date Nov 27, 2003
- Peter E. Maciejowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cathode assembly for indirectly heated cathode ion source
- Publication number 20010043040
- Publication date Nov 22, 2001
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS

Leo V. KLOS

Person

Patents Grantslast 30 patents

Indirectly heated cathode cartridge design

Cleaning of an extraction aperture of an ion source

Cleaning of an extraction aperture of an ion source

Apparatus and system for controlling ion ribbon beam uniformity in...

Technique for improving performance and extending lifetime of indir...

Cathode assembly for indirectly heated cathode ion source

Source arc chamber for ion implanter having repeller electrode moun...

Methods and apparatus for alignment of ion beam systems using beam...

Charged particle beam system having beam-defining slit formed by ro...

Fluid flow sensor with flexible vane

Low deflection force sensitive pick

Multiple wafer holder for a wafer transfer system

Patents Applicationslast 30 patents

INDIRECTLY HEATED CATHODE CARTRIDGE DESIGN

CLEANING OF AN EXTRACTION APERTURE OF AN ION SOURCE

CLEANING OF AN EXTRACTION APERTURE OF AN ION SOURCE

APPARATUS AND SYSTEM FOR CONTROLLING ION RIBBON BEAM UNIFORMITY IN...

Technique for improving performance and extending lifetime of induc...

SOURCE ARC CHAMBER FOR ION IMPLANTER HAVING REPELLER ELECTRODE MOUN...

Indirectly heated cathode ion source

Cathode assembly for indirectly heated cathode ion source