Leon Martin LEVASIER

Person

Hedel, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for monitoring a lithographic manufacturing p...
- Patent number 11,422,476
- Issue date Aug 23, 2022
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,935,895
- Issue date Mar 2, 2021
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for monitoring a lithographic manufacturing p...
- Patent number 10,866,527
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for compensating for an exposure error, a device manufacturi...
- Patent number 9,983,489
- Issue date May 29, 2018
- ASML Netherlands B.V.
- Christianus Wilhelmus Johannes Berendsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,797,504
- Issue date Aug 5, 2014
- ASML Netherlands B.V.
- Han-Kwang Nienhuys
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,730,448
- Issue date May 20, 2014
- ASML Netherlands B.V.
- Han-Kwang Nienhuys
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,514,365
- Issue date Aug 20, 2013
- ASML Netherlands B.V.
- Frederik Eduard De Jong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method, lithographic apparatus and a computer...
- Patent number 8,477,287
- Issue date Jul 2, 2013
- ASML Netherlands B.V.
- Alex Oudshoorn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 8,368,902
- Issue date Feb 5, 2013
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation beam modification apparatus and method
- Patent number 8,351,022
- Issue date Jan 8, 2013
- ASML Netherlands B.V.
- Wilhelmus Petrus De Boeij
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,289,498
- Issue date Oct 16, 2012
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,880,901
- Issue date Feb 1, 2011
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,859,686
- Issue date Dec 28, 2010
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for manufacturing a device
- Patent number 7,542,127
- Issue date Jun 2, 2009
- ASML Netherlands B.V.
- Timotheus Franciscus Sengers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,528,965
- Issue date May 5, 2009
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,408,655
- Issue date Aug 5, 2008
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,292,312
- Issue date Nov 6, 2007
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, position quantity detection system and method
- Patent number 7,271,917
- Issue date Sep 18, 2007
- ASML Netherlands B.V.
- Edwin Teunis Van Donkelaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for calibrating the same
- Patent number 7,256,871
- Issue date Aug 14, 2007
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Using unflatness information of the substrate table or mask table f...
- Patent number 7,239,368
- Issue date Jul 3, 2007
- ASML Netherlands B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, projection system, method of projecting and...
- Patent number 7,170,580
- Issue date Jan 30, 2007
- ASML Netherlands B.V.
- Martinus Hendrikus Antonius Leenders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with alignment subsystem, device manufacturi...
- Patent number 7,002,667
- Issue date Feb 21, 2006
- ASML, Netherlands B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with alignment subsystem, device manufacturi...
- Patent number 6,995,831
- Issue date Feb 7, 2006
- ASML Netherlands B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method of calibration, calibration plate, d...
- Patent number 6,955,074
- Issue date Oct 18, 2005
- ASML Netherlands, B.V.
- Leon Martin Levasier
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Abbe arm calibration system for use in lithographic apparatus
- Patent number 6,730,920
- Issue date May 4, 2004
- ASML Netherlands B.V.
- Rogier H. M. Groeneveld
- F41 - WEAPONS
Information Patent Grant
Method for calibrating a lithographic projection apparatus and appa...
- Patent number 6,710,849
- Issue date Mar 23, 2004
- ASML Netherlands B.V.
- Yim Bun Patrick Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
- Publication number 20230384694
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Abdullah ALIKHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS & APPARATUS FOR MONITORING A LITHOGRAPHIC MANUFACTURING PRO...
- Publication number 20210018847
- Publication date Jan 21, 2021
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS & APPARATUS FOR MONITORING A LITHOGRAPHIC MANUFACTURING PRO...
- Publication number 20200004164
- Publication date Jan 2, 2020
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus
- Publication number 20190369508
- Publication date Dec 5, 2019
- ASML NETHERLANDS B.V.
- Adrianus Hendrik KOEVOETS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic Apparatus
- Publication number 20180173116
- Publication date Jun 21, 2018
- ASML NETHERLANDS B.V.
- Adrianus Hendrik KOEVOETS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Compensating for an Exposure Error, a Device Manufacturi...
- Publication number 20170115578
- Publication date Apr 27, 2017
- ASML NETHERLANDS B.V.
- Christianus Wilhelmus Johannes BERENDSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Support Structure, Method of Controlling the Temperature Of The Sam...
- Publication number 20160035605
- Publication date Feb 4, 2016
- ASML NETHERLANDS B.V.
- Roger Wilhelmus Antonius Henricus SCHMITZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120229782
- Publication date Sep 13, 2012
- ASML NETHERLANDS B.V.
- Han-Kwang Nienhuys
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120229783
- Publication date Sep 13, 2012
- ASML NETHERLANDS B.V.
- Han-Kwang Nienhuys
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Calibrating a Target Surface of a Position Measurement S...
- Publication number 20120078561
- Publication date Mar 29, 2012
- ASML NETHERLANDS B.V.
- Paulus Johannes KNIJN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME
- Publication number 20110075154
- Publication date Mar 31, 2011
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation Beam Modification Apparatus and Method
- Publication number 20100315612
- Publication date Dec 16, 2010
- ASML NETHERLANDS B.V.
- Wilhelmus Petrus DE BOEIJ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device Manufacturing Method, Lithographic Apparatus and a Computer...
- Publication number 20100231890
- Publication date Sep 16, 2010
- Alex Oudshoorn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME
- Publication number 20100220335
- Publication date Sep 2, 2010
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100002207
- Publication date Jan 7, 2010
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME
- Publication number 20090207422
- Publication date Aug 20, 2009
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080297744
- Publication date Dec 4, 2008
- ASML NETHERLANDS B.V.
- Frederik Eduard De Jong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for calibrating the same
- Publication number 20080074681
- Publication date Mar 27, 2008
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for calibrating the same
- Publication number 20070256471
- Publication date Nov 8, 2007
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for manufacturing a device
- Publication number 20070139629
- Publication date Jun 21, 2007
- ASML NETHERLANDS B.V.
- Timotheus Franciscus Sengers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method of monitoring and diagnosing system condition and...
- Publication number 20070002295
- Publication date Jan 4, 2007
- ASML NETHERLANDS B.V.
- Maria Elisabeth Reuhman-Huisken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, position quantity detection system and method
- Publication number 20060250617
- Publication date Nov 9, 2006
- ASML NETHERLANDS B.V.
- Edwin Teunis Van Donkelaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Using unflatness information of the substrate table or mask table f...
- Publication number 20060114436
- Publication date Jun 1, 2006
- ASML NETHERLANDS B.V.
- Rene Oesterholt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for calibrating the same
- Publication number 20060023178
- Publication date Feb 2, 2006
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for calibrating the same
- Publication number 20060023194
- Publication date Feb 2, 2006
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus with alignment subsystem, device manufacturi...
- Publication number 20050146699
- Publication date Jul 7, 2005
- ASML NETHERLANDS B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, method of calibration, calibration plate, d...
- Publication number 20050138988
- Publication date Jun 30, 2005
- ASML NETHERLANDS B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, projection system, method of projecting and...
- Publication number 20040257549
- Publication date Dec 23, 2004
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius Leenders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Abbe arm calibration system for use in lithographic apparatus
- Publication number 20040184018
- Publication date Sep 23, 2004
- ASML NETHERLANDS B.V.
- Rogier H.M. Groeneveld
- F41 - WEAPONS
Information Patent Application
Lithographic apparatus with alignment subsystem, device manufacturi...
- Publication number 20040179184
- Publication date Sep 16, 2004
- ASML NETHERLANDS B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Leon Martin LEVASIER

Person

Patents Grantslast 30 patents

Methods and apparatus for monitoring a lithographic manufacturing p...

Lithographic apparatus

Methods and apparatus for monitoring a lithographic manufacturing p...

Method for compensating for an exposure error, a device manufacturi...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Device manufacturing method, lithographic apparatus and a computer...

Lithographic apparatus and method for calibrating the same

Radiation beam modification apparatus and method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for manufacturing a device

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus, position quantity detection system and method

Lithographic apparatus and method for calibrating the same

Using unflatness information of the substrate table or mask table f...

Lithographic apparatus, projection system, method of projecting and...

Lithographic apparatus with alignment subsystem, device manufacturi...

Lithographic apparatus with alignment subsystem, device manufacturi...

Lithographic apparatus, method of calibration, calibration plate, d...

Abbe arm calibration system for use in lithographic apparatus

Method for calibrating a lithographic projection apparatus and appa...

Patents Applicationslast 30 patents

VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...

METHODS & APPARATUS FOR MONITORING A LITHOGRAPHIC MANUFACTURING PRO...

METHODS & APPARATUS FOR MONITORING A LITHOGRAPHIC MANUFACTURING PRO...

Lithographic Apparatus

Lithographic Apparatus

Method For Compensating for an Exposure Error, a Device Manufacturi...

Support Structure, Method of Controlling the Temperature Of The Sam...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Method for Calibrating a Target Surface of a Position Measurement S...

LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME

Radiation Beam Modification Apparatus and Method

Device Manufacturing Method, Lithographic Apparatus and a Computer...

LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND METHOD FOR CALIBRATING THE SAME

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for manufacturing a device

System and method of monitoring and diagnosing system condition and...

Lithographic apparatus, position quantity detection system and method

Using unflatness information of the substrate table or mask table f...

Lithographic apparatus and method for calibrating the same

Lithographic apparatus and method for calibrating the same

Lithographic apparatus with alignment subsystem, device manufacturi...

Lithographic apparatus, method of calibration, calibration plate, d...

Lithographic apparatus, projection system, method of projecting and...

Abbe arm calibration system for use in lithographic apparatus

Lithographic apparatus with alignment subsystem, device manufacturi...