Leonard E. Klebanoff

Person

San Ciemente, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ternary borides and borohydrides for hydrogen storage and method of...
- Patent number 11,192,783
- Issue date Dec 7, 2021
- National Technology & Engineering Solutions of Sandia, LLC
- Vitalie Stavila
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Nanostructured metal amides and nitrides for hydrogen storage
- Patent number 10,000,377
- Issue date Jun 19, 2018
- National Technology & Engineering Solutions of Sandia, LLC
- Vitalie Stavila
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Particle and chemical control using tunnel flow
- Patent number 9,759,912
- Issue date Sep 12, 2017
- KLA-Tencor Corporation
- Frank Chilese
- G02 - OPTICS
Information Patent Grant
Methods and apparatus for use with extreme ultraviolet light having...
- Patent number 9,389,180
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Francis C. Chilese
- G01 - MEASURING TESTING
Information Patent Grant
Particle control near reticle and optics using showerhead
- Patent number 9,244,368
- Issue date Jan 26, 2016
- KLA-Tencor Corporation
- Gildardo R. Delgado
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for cleaning objects in a chamber of an optic...
- Patent number 9,156,068
- Issue date Oct 13, 2015
- KLA-Tencor Corporation
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Grant
Mobile lighting apparatus
- Patent number 8,439,534
- Issue date May 14, 2013
- George Michael Roe
- F21 - LIGHTING
Information Patent Grant
Method for the protection of extreme ultraviolet lithography optics
- Patent number 7,740,916
- Issue date Jun 22, 2010
- EUV LLC
- Philip A. Grunow
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Adhesive particle shielding
- Patent number 7,473,301
- Issue date Jan 6, 2009
- EUV LLC
- Leonard Elliott Klebanoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for in-situ cleaning of carbon contaminated surfaces
- Patent number 7,147,722
- Issue date Dec 12, 2006
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Grant
Method and apparatus for debris mitigation for an electrical discha...
- Patent number 6,989,629
- Issue date Jan 24, 2006
- EUV LLC
- Leonard E. Klebanoff
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for debris mitigation for an electrical discha...
- Patent number 6,888,297
- Issue date May 3, 2005
- EUV LLC
- Leonard E. Klebanoff
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for in situ cleaning of carbon contaminated surfaces
- Patent number 6,772,776
- Issue date Aug 10, 2004
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Grant
Self-cleaning optic for extreme ultraviolet lithography
- Patent number 6,664,554
- Issue date Dec 16, 2003
- EUV LLC
- Leonard E. Klebanoff
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme-UV lithography vacuum chamber zone seal
- Patent number 6,549,264
- Issue date Apr 15, 2003
- EUV LLC
- Steven J. Haney
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme-UV lithography vacuum chamber zone seal
- Patent number 6,545,745
- Issue date Apr 8, 2003
- EUV LLC
- Steven J. Haney
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mitigation of radiation induced surface contamination
- Patent number 6,533,952
- Issue date Mar 18, 2003
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Grant
Removable pellicle for lithographic mask protection and handling
- Patent number 6,492,067
- Issue date Dec 10, 2002
- EUV LLC
- Leonard E. Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme-UV lithography vacuum chamber zone seal
- Patent number 6,333,775
- Issue date Dec 25, 2001
- EUV LLC
- Steven J. Haney
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid zone seal
- Patent number 6,279,601
- Issue date Aug 28, 2001
- EUV LLC
- Leonard E. Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for protection of lithographic components from particle cont...
- Patent number 6,253,464
- Issue date Jul 3, 2001
- EUV LLC
- Leonard E. Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermophoretic vacuum wand
- Patent number 6,232,578
- Issue date May 15, 2001
- BUV LLC
- Leonard Elliott Klebanoff
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Process for producing radiation-induced self-terminating protective...
- Patent number 6,231,930
- Issue date May 15, 2001
- EUV LLC
- Leonard E. Klebanoff
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for in-situ cleaning of resist outgassing windows
- Patent number 6,192,897
- Issue date Feb 27, 2001
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Grant
Electrostatically screened, voltage-controlled electrostatic chuck
- Patent number 6,169,652
- Issue date Jan 2, 2001
- Euv, L.L.C
- Leonard Elliott Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Protection of lithographic components from particle contamination
- Patent number 6,153,044
- Issue date Nov 28, 2000
- EUV LLC
- Leonard E. Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermophoretic vacuum wand
- Patent number 6,072,157
- Issue date Jun 6, 2000
- EUV LLC
- Leonard Elliott Klebanoff
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR CLEANING OBJECTS IN A CHAMBER OF AN OPTIC...
- Publication number 20140374619
- Publication date Dec 25, 2014
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING...
- Publication number 20140231659
- Publication date Aug 21, 2014
- Frank Chilese
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL COMPONENT WITH BLOCKING SURFACE AND METHOD THEREOF
- Publication number 20140158914
- Publication date Jun 12, 2014
- Leonard E. Klebanoff
- G02 - OPTICS
Information Patent Application
PARTICLE AND CHEMICAL CONTROL USING TUNNEL FLOW
- Publication number 20140085724
- Publication date Mar 27, 2014
- Frank Chilese
- G02 - OPTICS
Information Patent Application
PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD
- Publication number 20140085618
- Publication date Mar 27, 2014
- Gildardo R. Delgado
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR THE PROTECTION OF EXTREME ULTRAVIOLET LITHOGRAPHY OPTICS
- Publication number 20100124723
- Publication date May 20, 2010
- Philip A. Grunow
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for in-situ cleaning of carbon contaminated surfaces
- Publication number 20040211448
- Publication date Oct 28, 2004
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Application
Method and apparatus for debris mitigation for an electrical discha...
- Publication number 20040119394
- Publication date Jun 24, 2004
- Leonard E. Klebanoff
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Adhesive particle shielding
- Publication number 20040050317
- Publication date Mar 18, 2004
- Leonard Elliott Klebanoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for removing carbon contamination from optic surfaces
- Publication number 20040011381
- Publication date Jan 22, 2004
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Application
Apparatus for in situ cleaning of carbon contaminated surfaces
- Publication number 20030051739
- Publication date Mar 20, 2003
- Leonard E. Klebanoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Self-cleaning optic for extreme ultraviolet lithography
- Publication number 20020084425
- Publication date Jul 4, 2002
- Leonard E. Klebanoff
- B82 - NANO-TECHNOLOGY
Information Patent Application
Extreme-UV lithography vacuum chamber zone seal
- Publication number 20020048003
- Publication date Apr 25, 2002
- Steven J. Haney
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Extreme-UV lithography vacuum chamber zone seal
- Publication number 20020048002
- Publication date Apr 25, 2002
- Steven J. Haney
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MITIGATION OF RADIATION INDUCED SURFACE CONTAMINATION
- Publication number 20010053414
- Publication date Dec 20, 2001
- LEONARD E. KLEBANOFF
- B08 - CLEANING

Leonard E. Klebanoff

Person

Patents Grantslast 30 patents

Ternary borides and borohydrides for hydrogen storage and method of...

Nanostructured metal amides and nitrides for hydrogen storage

Particle and chemical control using tunnel flow

Methods and apparatus for use with extreme ultraviolet light having...

Particle control near reticle and optics using showerhead

Methods and apparatus for cleaning objects in a chamber of an optic...

Mobile lighting apparatus

Method for the protection of extreme ultraviolet lithography optics

Adhesive particle shielding

Method for in-situ cleaning of carbon contaminated surfaces

Method and apparatus for debris mitigation for an electrical discha...

Method and apparatus for debris mitigation for an electrical discha...

Apparatus for in situ cleaning of carbon contaminated surfaces

Self-cleaning optic for extreme ultraviolet lithography

Extreme-UV lithography vacuum chamber zone seal

Extreme-UV lithography vacuum chamber zone seal

Mitigation of radiation induced surface contamination

Removable pellicle for lithographic mask protection and handling

Extreme-UV lithography vacuum chamber zone seal

Liquid zone seal

Method for protection of lithographic components from particle cont...

Thermophoretic vacuum wand

Process for producing radiation-induced self-terminating protective...

Apparatus and method for in-situ cleaning of resist outgassing windows

Electrostatically screened, voltage-controlled electrostatic chuck

Protection of lithographic components from particle contamination

Thermophoretic vacuum wand

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR CLEANING OBJECTS IN A CHAMBER OF AN OPTIC...

METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING...

OPTICAL COMPONENT WITH BLOCKING SURFACE AND METHOD THEREOF

PARTICLE AND CHEMICAL CONTROL USING TUNNEL FLOW

PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD

METHOD FOR THE PROTECTION OF EXTREME ULTRAVIOLET LITHOGRAPHY OPTICS

Apparatus for in-situ cleaning of carbon contaminated surfaces

Method and apparatus for debris mitigation for an electrical discha...

Adhesive particle shielding

Method for removing carbon contamination from optic surfaces

Apparatus for in situ cleaning of carbon contaminated surfaces

Self-cleaning optic for extreme ultraviolet lithography

Extreme-UV lithography vacuum chamber zone seal

Extreme-UV lithography vacuum chamber zone seal

MITIGATION OF RADIATION INDUCED SURFACE CONTAMINATION