Leonard J. Sharpless

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Moving substrate transfer chamber
- Patent number 11,282,737
- Issue date Mar 22, 2022
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 10,037,869
- Issue date Jul 31, 2018
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of casting internal features
- Patent number 9,687,908
- Issue date Jun 27, 2017
- Law Research Corporation
- Leonard Sharpless
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Coating method for gas delivery system
- Patent number 9,689,533
- Issue date Jun 27, 2017
- Lam Research Corporation
- Ian Kenworthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable upper chamber section of plasma processing apparatus
- Patent number 9,613,834
- Issue date Apr 4, 2017
- Lam Research Corporation
- Leonard J. Sharpless
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable chamber liner plasma confinement screen combination for pla...
- Patent number 9,490,135
- Issue date Nov 8, 2016
- Lam Research Corporation
- Danny Brown
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma chamber top piece assembly
- Patent number 9,318,349
- Issue date Apr 19, 2016
- Lam Research Corporation
- Leonard J. Sharpless
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Coating method for gas delivery system
- Patent number 8,852,685
- Issue date Oct 7, 2014
- Lam Research Corporation
- Ian Kenworthy
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Movable chamber liner plasma confinement screen combination for pla...
- Patent number 8,597,462
- Issue date Dec 3, 2013
- Lam Research Corporation
- Danny Brown
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vacuum sealing radio frequency (RF) and low frequency conducting ac...
- Patent number 8,597,428
- Issue date Dec 3, 2013
- Lam Research Corporation
- Danny Brown
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Plasma chamber top piece assembly
- Patent number 8,540,843
- Issue date Sep 24, 2013
- Lam Research Corporation
- Leonard J. Sharpless
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Methods for accessing a process chamber using a dual zone gas injec...
- Patent number 8,524,099
- Issue date Sep 3, 2013
- Lam Research Corporation
- Jeff A. Bogart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum-plated components of semiconductor material and methods of...
- Patent number 8,282,987
- Issue date Oct 9, 2012
- Lam Research Corporation
- Ian J. Kenworthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum-plated components of semiconductor material processing app...
- Patent number 8,128,750
- Issue date Mar 6, 2012
- Lam Research Corporation
- Ian J. Kenworthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of and apparatus for accessing a process chamber using a du...
- Patent number 7,928,366
- Issue date Apr 19, 2011
- Lam Research Corporation
- Jeff A. Bogart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for an optimized plasma chamber top piece
- Patent number 7,780,791
- Issue date Aug 24, 2010
- Lam Research Corporation
- Leonard J. Sharpless
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive manometer having reduced process drift
- Patent number 6,901,808
- Issue date Jun 7, 2005
- Lam Research Corporation
- Leonard J. Sharpless
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MOVING SUBSTRATE TRANSFER CHAMBER
- Publication number 20200381285
- Publication date Dec 3, 2020
- LAM RESEARCH CORPORATION
- Daniel Arthur BROWN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20180323041
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CASTING INTERNAL FEATURES
- Publication number 20170066045
- Publication date Mar 9, 2017
- LAM RESEARCH CORPORATION
- Leonard Sharpless
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20160033977
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma Processing Devices Having Multi-Port Valve Assemblies
- Publication number 20150047785
- Publication date Feb 19, 2015
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD FOR GAS DELIVERY SYSTEM
- Publication number 20140366968
- Publication date Dec 18, 2014
- Ian Kenworthy
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MOVABLE CHAMBER LINER PLASMA CONFINEMENT SCREEN COMBINATION FOR PLA...
- Publication number 20140051254
- Publication date Feb 20, 2014
- LAM RESEARCH CORPORATION
- Danny Brown
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA CHAMBER TOP PIECE ASSEMBLY
- Publication number 20130306239
- Publication date Nov 21, 2013
- LAM RESEARCH CORPORATION
- Leonard J. Sharpless
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
ALUMINUM-PLATED COMPONENTS OF SEMICONDUCTOR MATERIAL PROCESSING APP...
- Publication number 20120132532
- Publication date May 31, 2012
- LAM RESEARCH CORPORATION
- Ian J. Kenworthy
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLASMA CHAMBER TOP PIECE ASSEMBLY
- Publication number 20120043022
- Publication date Feb 23, 2012
- Leonard J. Sharpless
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE CHAMBER LINER PLASMA CONFINEMENT SCREEN COMBINATION FOR PLA...
- Publication number 20110287632
- Publication date Nov 24, 2011
- LAM RESEARCH CORPORATION
- Danny Brown
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COATING METHOD FOR GAS DELIVERY SYSTEM
- Publication number 20110259519
- Publication date Oct 27, 2011
- LAM RESEARCH CORPORATION
- Ian Kenworthy
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Methods for Accessing a Process Chamber Using a Dual Zone Gas Injec...
- Publication number 20110103805
- Publication date May 5, 2011
- Jeff A. Bogart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REPLACEABLE UPPER CHAMBER SECTION OF PLASMA PROCESSING APPARATUS
- Publication number 20100243164
- Publication date Sep 30, 2010
- LAM RESEARCH CORPORATION
- Leonard J. Sharpless
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM SEALING RADIO FREQUENCY (RF) AND LOW FREQUENCY CONDUCTING AC...
- Publication number 20090152958
- Publication date Jun 18, 2009
- LAM RESEARCH CORPORATION
- Danny Brown
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
Aluminum-plated components of semiconductor material processing app...
- Publication number 20080241517
- Publication date Oct 2, 2008
- LAM RESEARCH CORPORATION
- Ian J. Kenworthy
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods of and apparatus for accessing a process chamber using a du...
- Publication number 20080083883
- Publication date Apr 10, 2008
- LAM RESEARCH CORPORATION
- Jeff A. Bogart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for shielding process chamber port having dual zone and o...
- Publication number 20070169704
- Publication date Jul 26, 2007
- LAM RESEARCH CORPORATION
- Fangli J. Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for an optimized plasma chamber top piece
- Publication number 20060000413
- Publication date Jan 5, 2006
- Leonard J. Sharpless
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for optimal temperature control in a plasma p...
- Publication number 20060000551
- Publication date Jan 5, 2006
- Miguel A. Saldana
- F28 - HEAT EXCHANGE IN GENERAL

Leonard J. Sharpless

Person

Patents Grantslast 30 patents

Moving substrate transfer chamber

Plasma processing devices having multi-port valve assemblies

Method of casting internal features

Coating method for gas delivery system

Replaceable upper chamber section of plasma processing apparatus

Movable chamber liner plasma confinement screen combination for pla...

Plasma chamber top piece assembly

Coating method for gas delivery system

Movable chamber liner plasma confinement screen combination for pla...

Vacuum sealing radio frequency (RF) and low frequency conducting ac...

Plasma chamber top piece assembly

Methods for accessing a process chamber using a dual zone gas injec...

Aluminum-plated components of semiconductor material and methods of...

Aluminum-plated components of semiconductor material processing app...

Methods of and apparatus for accessing a process chamber using a du...

Apparatus for an optimized plasma chamber top piece

Capacitive manometer having reduced process drift

Patents Applicationslast 30 patents

MOVING SUBSTRATE TRANSFER CHAMBER

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

METHOD OF CASTING INTERNAL FEATURES

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

Plasma Processing Devices Having Multi-Port Valve Assemblies

COATING METHOD FOR GAS DELIVERY SYSTEM

MOVABLE CHAMBER LINER PLASMA CONFINEMENT SCREEN COMBINATION FOR PLA...

PLASMA CHAMBER TOP PIECE ASSEMBLY

ALUMINUM-PLATED COMPONENTS OF SEMICONDUCTOR MATERIAL PROCESSING APP...

PLASMA CHAMBER TOP PIECE ASSEMBLY

MOVABLE CHAMBER LINER PLASMA CONFINEMENT SCREEN COMBINATION FOR PLA...

COATING METHOD FOR GAS DELIVERY SYSTEM

Methods for Accessing a Process Chamber Using a Dual Zone Gas Injec...

REPLACEABLE UPPER CHAMBER SECTION OF PLASMA PROCESSING APPARATUS

VACUUM SEALING RADIO FREQUENCY (RF) AND LOW FREQUENCY CONDUCTING AC...

Aluminum-plated components of semiconductor material processing app...

Methods of and apparatus for accessing a process chamber using a du...

Apparatus for shielding process chamber port having dual zone and o...

Apparatus for an optimized plasma chamber top piece

Methods and apparatus for optimal temperature control in a plasma p...