Leonard Wai Fung Kho

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 11,365,479
- Issue date Jun 21, 2022
- Lam Research Corporation
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 10,760,158
- Issue date Sep 1, 2020
- Lam Research Corporation
- Damodar Shanbhag
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FEATURE FILL WITH NUCLEATION INHIBITION
- Publication number 20230122846
- Publication date Apr 20, 2023
- LAM RESEARCH CORPORATION
- Rohit KHARE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20230002891
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE REACTIVE INHIBITION GAS
- Publication number 20220415711
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Gang LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20220275504
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE EXCLUSION CONTROL
- Publication number 20210375591
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Anand Chandrashekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING SYSTEM FOR REMOVING DEPOSITS FROM PUMP IN AN EXHAUST OF A...
- Publication number 20210257194
- Publication date Aug 19, 2021
- LAM RESEARCH CORPORATION
- Krishna BIRRU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20200347497
- Publication date Nov 5, 2020
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20190185999
- Publication date Jun 20, 2019
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Leonard Wai Fung Kho

Person

Patents Grantslast 30 patents

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Patents Applicationslast 30 patents

FEATURE FILL WITH NUCLEATION INHIBITION

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

BACKSIDE REACTIVE INHIBITION GAS

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

EDGE EXCLUSION CONTROL

CLEANING SYSTEM FOR REMOVING DEPOSITS FROM PUMP IN AN EXHAUST OF A...

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING