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Johor, MY
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last 30 patents
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Patent Grant
Bi-layer resist process for dual damascene
Patent number
6,436,810
Issue date
Aug 20, 2002
Institute of Microelectronics
Rakesh Kumar
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Tri-layer resist method for dual damascene process
Patent number
6,242,344
Issue date
Jun 5, 2001
Institute of Microelectronics
Leong Tee Koh
H01 - BASIC ELECTRIC ELEMENTS