Leonid Borisovich Zvedenuk

Follow

Person

Moscow, RU

People

Patents Grantslast 30 patents

Information Patent Grant
Swirler for laser-sustained plasma light source with reverse vortex...
- Patent number 11,978,620
- Issue date May 7, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-sustained plasma light source with reverse vortex flow
- Patent number 11,776,804
- Issue date Oct 3, 2023
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-sustained plasma light source with gas vortex flow
- Patent number 11,690,162
- Issue date Jun 27, 2023
- KLA Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for EUV mask inspection
- Patent number 11,635,700
- Issue date Apr 25, 2023
- Erel Milshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Rotating lamp for laser-sustained plasma illumination source
- Patent number 11,596,048
- Issue date Feb 28, 2023
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SWIRLER FOR LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX...
- Publication number 20230053035
- Publication date Feb 16, 2023
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX FLOW
- Publication number 20220344146
- Publication date Oct 27, 2022
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for EUV Mask Inspection
- Publication number 20220260928
- Publication date Aug 18, 2022
- KLA Corporation
- Erel Milshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER-SUSTAINED PLASMA LIGHT SOURCE WITH GAS VORTEX FLOW
- Publication number 20210321508
- Publication date Oct 14, 2021
- KLA Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE
- Publication number 20210092826
- Publication date Mar 25, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS