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Leonid Romm
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Fremont, CA, US
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last 30 patents
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Patent Grant
Dielectric contact etch
Patent number
10,134,600
Issue date
Nov 20, 2018
Lam Research Corporation
Leonid Romm
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods for fabricating interconnect structures having Low K dielec...
Patent number
6,653,224
Issue date
Nov 25, 2003
Lam Research Corporation
Yehiel Gotkis
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
DIELECTRIC CONTACT ETCH
Publication number
20180226260
Publication date
Aug 9, 2018
LAM RESEARCH CORPORATION
Leonid ROMM
H01 - BASIC ELECTRIC ELEMENTS