Leonid Shmaenok

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Nieuwegein, NL

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Patents Grantslast 30 patents

Information Patent Grant
Multi-layer spectral purity filter, lithographic apparatus includin...
- Patent number 7,639,418
- Issue date Dec 29, 2009
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-layer spectral purity filter, lithographic apparatus includin...
- Patent number 7,372,623
- Issue date May 13, 2008
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Filter for extreme ultraviolet lithography
- Patent number 6,359,969
- Issue date Mar 19, 2002
- Stichting Voor de Technische Wetenschappen
- Leonid Shmaenok
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Multi-layer spectral purity filter, lithographic apparatus includin...
- Publication number 20080151361
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multi-layer spectral purity filter, lithographic apparatus includin...
- Publication number 20060221440
- Publication date Oct 5, 2006
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY