Leslie L. Deck

Person

Middletown, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical contact metrology
- Patent number 12,305,980
- Issue date May 20, 2025
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for optimizing the optical performance of inte...
- Patent number 10,962,348
- Issue date Mar 30, 2021
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric method and apparatus using calibration information...
- Patent number 10,890,428
- Issue date Jan 12, 2021
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Wavemeter using pairs of interferometric optical cavities
- Patent number 10,845,251
- Issue date Nov 24, 2020
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Metrology of multi-layer stacks
- Patent number 10,591,284
- Issue date Mar 17, 2020
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Surface topography apparatus and method
- Patent number 10,451,413
- Issue date Oct 22, 2019
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for optimizing the optical performance of inte...
- Patent number 10,267,617
- Issue date Apr 23, 2019
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Precision positioning system using a wavelength tunable laser
- Patent number 10,190,871
- Issue date Jan 29, 2019
- Zygo Corporation
- Leslie L. Deck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interferometric encoders using spectral analysis
- Patent number 9,891,078
- Issue date Feb 13, 2018
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Position monitoring system with reduced noise
- Patent number 9,115,975
- Issue date Aug 25, 2015
- Zygo Corporation
- Jan Liesener
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric encoder systems
- Patent number 8,988,690
- Issue date Mar 24, 2015
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Low coherence interferometry with scan error correction
- Patent number 8,902,431
- Issue date Dec 2, 2014
- Zygo Corporation
- Jan Liesener
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric encoder systems
- Patent number 8,670,127
- Issue date Mar 11, 2014
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Fiber-based interferometer system for monitoring an imaging interfe...
- Patent number 8,379,218
- Issue date Feb 19, 2013
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric encoder systems
- Patent number 8,300,233
- Issue date Oct 30, 2012
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric systems and methods featuring spectral analysis of...
- Patent number 8,120,781
- Issue date Feb 21, 2012
- Zygo Corporation
- Jan Liesener
- G01 - MEASURING TESTING
Information Patent Grant
Equal-path interferometer
- Patent number 8,045,175
- Issue date Oct 25, 2011
- Zygo Corporation
- Peter J. De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Scan error correction in low coherence scanning interferometry
- Patent number 8,004,688
- Issue date Aug 23, 2011
- Zygo Corporation
- Mark Davidson
- G01 - MEASURING TESTING
Information Patent Grant
Compound reference interferometer
- Patent number 7,978,338
- Issue date Jul 12, 2011
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Phase-shifting interferometry in the presence of vibration
- Patent number 7,948,639
- Issue date May 24, 2011
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer system for monitoring an object
- Patent number 7,826,064
- Issue date Nov 2, 2010
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Phase-shifting interferometry in the presence of vibration
- Patent number 7,796,273
- Issue date Sep 14, 2010
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Phase-shifting interferometry in the presence of vibration using ph...
- Patent number 7,796,275
- Issue date Sep 14, 2010
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Vibration resistant interferometry
- Patent number 7,710,580
- Issue date May 4, 2010
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer system for monitoring an object
- Patent number 7,639,367
- Issue date Dec 29, 2009
- Zygo Corporation
- Peter de Groot
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer system for monitoring an object
- Patent number 7,636,166
- Issue date Dec 22, 2009
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Phase shifting interferometry with multiple accumulation
- Patent number 7,564,568
- Issue date Jul 21, 2009
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Grant
Method for compensating errors in interferometric surface metrology
- Patent number 7,327,469
- Issue date Feb 5, 2008
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Vibration resistant interferometry
- Patent number 7,321,430
- Issue date Jan 22, 2008
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Grant
Vibration resistant interferometry
- Patent number 7,277,183
- Issue date Oct 2, 2007
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DYNAMIC INTERFEROMETER ILLUMINATOR
- Publication number 20250123095
- Publication date Apr 17, 2025
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC METHOD FOR MEASURING OPTICAL DISTANCE
- Publication number 20250123093
- Publication date Apr 17, 2025
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL CONTACT METROLOGY
- Publication number 20230092947
- Publication date Mar 23, 2023
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
WAVEMETER
- Publication number 20200003620
- Publication date Jan 2, 2020
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZING THE OPTICAL PERFORMANCE OF INTE...
- Publication number 20190346251
- Publication date Nov 14, 2019
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY OF MULTI-LAYER STACKS
- Publication number 20190265023
- Publication date Aug 29, 2019
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
SURFACE TOPOGRAPHY APPARATUS AND METHOD
- Publication number 20180180412
- Publication date Jun 28, 2018
- Zygo Corporation
- Peter J. de Groot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZING THE OPTICAL PERFORMANCE OF INTE...
- Publication number 20180143002
- Publication date May 24, 2018
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
PRECISION POSITIONING SYSTEM USING A WAVELENGTH TUNABLE LASER
- Publication number 20170356739
- Publication date Dec 14, 2017
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZING THE OPTICAL PERFORMANCE OF INTE...
- Publication number 20170191821
- Publication date Jul 6, 2017
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC ENCODERS USING SPECTRAL ANALYSIS
- Publication number 20160011016
- Publication date Jan 14, 2016
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
COHERENCE SCANNING INTERFEROMETRY USING PHASE SHIFTED INTERFEROMETR...
- Publication number 20150002852
- Publication date Jan 1, 2015
- Zygo Corporation
- Peter J. de Groot
- G01 - MEASURING TESTING
Information Patent Application
POSITION MONITORING SYSTEM WITH REDUCED NOISE
- Publication number 20140098375
- Publication date Apr 10, 2014
- Jan Liesener
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC ENCODER SYSTEMS
- Publication number 20140049782
- Publication date Feb 20, 2014
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
LOW COHERENCE INTERFEROMETRY WITH SCAN ERROR CORRECTION
- Publication number 20130155413
- Publication date Jun 20, 2013
- Zygo Corporation
- Jan Liesener
- G01 - MEASURING TESTING
Information Patent Application
LOW COHERENCE INTERFEROMETRY USING ENCODER SYSTEMS
- Publication number 20130114087
- Publication date May 9, 2013
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC ENCODER SYSTEMS
- Publication number 20120170048
- Publication date Jul 5, 2012
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC ENCODER SYSTEMS
- Publication number 20110255096
- Publication date Oct 20, 2011
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
PHASE-SHIFTING INTERFEROMETRY IN THE PRESENCE OF VIBRATION
- Publication number 20110026036
- Publication date Feb 3, 2011
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
Equal-Path Interferometer
- Publication number 20110007323
- Publication date Jan 13, 2011
- Zygo Corporation
- Peter J. De Groot
- G02 - OPTICS
Information Patent Application
COMPOUND REFERENCE INTERFEROMETER
- Publication number 20100128276
- Publication date May 27, 2010
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Application
FIBER-BASED INTERFEROMETER SYSTEM FOR MONITORING AN IMAGING INTERFE...
- Publication number 20100128278
- Publication date May 27, 2010
- Zygo Corporation
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
SCAN ERROR CORRECTION IN LOW COHERENCE SCANNING INTERFEROMETRY
- Publication number 20100128280
- Publication date May 27, 2010
- Zygo Corporation
- Mark Davidson
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC SYSTEMS AND METHODS FEATURING SPECTRAL ANALYSIS OF...
- Publication number 20100128283
- Publication date May 27, 2010
- Zygo Corporation
- Jan Liesener
- G01 - MEASURING TESTING
Information Patent Application
PHASE-SHIFTING INTERFEROMETRY IN THE PRESENCE OF VIBRATION USING PH...
- Publication number 20100118312
- Publication date May 13, 2010
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
PHASE-SHIFTING INTERFEROMETRY IN THE PRESENCE OF VIBRATION
- Publication number 20100118313
- Publication date May 13, 2010
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER SYSTEM FOR MONITORING AN OBJECT
- Publication number 20100091296
- Publication date Apr 15, 2010
- Zygo Corporation
- Peter De Groot
- G01 - MEASURING TESTING
Information Patent Application
Vibration Resistant Interferometry
- Publication number 20080266571
- Publication date Oct 30, 2008
- Leslie L. Deck
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER SYSTEM FOR MONITORING AN OBJECT
- Publication number 20080165347
- Publication date Jul 10, 2008
- Zygo Corporation
- Peter de Groot
- G01 - MEASURING TESTING
Information Patent Application
Phase Shifting Interferometry With Multiple Accumulation
- Publication number 20070206201
- Publication date Sep 6, 2007
- Peter de Groot
- G01 - MEASURING TESTING

Leslie L. Deck

Person

Patents Grantslast 30 patents

Optical contact metrology

Method and apparatus for optimizing the optical performance of inte...

Interferometric method and apparatus using calibration information...

Wavemeter using pairs of interferometric optical cavities

Metrology of multi-layer stacks

Surface topography apparatus and method

Method and apparatus for optimizing the optical performance of inte...

Precision positioning system using a wavelength tunable laser

Interferometric encoders using spectral analysis

Position monitoring system with reduced noise

Interferometric encoder systems

Low coherence interferometry with scan error correction

Interferometric encoder systems

Fiber-based interferometer system for monitoring an imaging interfe...

Interferometric encoder systems

Interferometric systems and methods featuring spectral analysis of...

Equal-path interferometer

Scan error correction in low coherence scanning interferometry

Compound reference interferometer

Phase-shifting interferometry in the presence of vibration

Interferometer system for monitoring an object

Phase-shifting interferometry in the presence of vibration

Phase-shifting interferometry in the presence of vibration using ph...

Vibration resistant interferometry

Interferometer system for monitoring an object

Interferometer system for monitoring an object

Phase shifting interferometry with multiple accumulation

Method for compensating errors in interferometric surface metrology

Vibration resistant interferometry

Vibration resistant interferometry

Patents Applicationslast 30 patents

DYNAMIC INTERFEROMETER ILLUMINATOR

INTERFEROMETRIC METHOD FOR MEASURING OPTICAL DISTANCE

OPTICAL CONTACT METROLOGY

WAVEMETER

METHOD AND APPARATUS FOR OPTIMIZING THE OPTICAL PERFORMANCE OF INTE...

METROLOGY OF MULTI-LAYER STACKS

SURFACE TOPOGRAPHY APPARATUS AND METHOD

METHOD AND APPARATUS FOR OPTIMIZING THE OPTICAL PERFORMANCE OF INTE...

PRECISION POSITIONING SYSTEM USING A WAVELENGTH TUNABLE LASER

METHOD AND APPARATUS FOR OPTIMIZING THE OPTICAL PERFORMANCE OF INTE...

INTERFEROMETRIC ENCODERS USING SPECTRAL ANALYSIS

COHERENCE SCANNING INTERFEROMETRY USING PHASE SHIFTED INTERFEROMETR...

POSITION MONITORING SYSTEM WITH REDUCED NOISE

INTERFEROMETRIC ENCODER SYSTEMS

LOW COHERENCE INTERFEROMETRY WITH SCAN ERROR CORRECTION

LOW COHERENCE INTERFEROMETRY USING ENCODER SYSTEMS

INTERFEROMETRIC ENCODER SYSTEMS

INTERFEROMETRIC ENCODER SYSTEMS

PHASE-SHIFTING INTERFEROMETRY IN THE PRESENCE OF VIBRATION

Equal-Path Interferometer

COMPOUND REFERENCE INTERFEROMETER

FIBER-BASED INTERFEROMETER SYSTEM FOR MONITORING AN IMAGING INTERFE...

SCAN ERROR CORRECTION IN LOW COHERENCE SCANNING INTERFEROMETRY

INTERFEROMETRIC SYSTEMS AND METHODS FEATURING SPECTRAL ANALYSIS OF...

PHASE-SHIFTING INTERFEROMETRY IN THE PRESENCE OF VIBRATION USING PH...

PHASE-SHIFTING INTERFEROMETRY IN THE PRESENCE OF VIBRATION

INTERFEROMETER SYSTEM FOR MONITORING AN OBJECT

Vibration Resistant Interferometry

INTERFEROMETER SYSTEM FOR MONITORING AN OBJECT

Phase Shifting Interferometry With Multiple Accumulation