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Leslie W. Arkless
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Glasgow, GB
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last 30 patents
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Patent Grant
Post etch cleaning composition for dual damascene system
Patent number
7,157,415
Issue date
Jan 2, 2007
EKC Technology, Inc.
Catherine M. Peyne
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
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Patent Grant
Post etch cleaning composition and process for dual damascene system
Patent number
6,417,112
Issue date
Jul 9, 2002
EKC Technology, Inc.
Catherine M. Peyne
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Post etch cleaning composition for dual damascene system
Publication number
20020134963
Publication date
Sep 26, 2002
EKC Technology, Inc.
Catherine M. Peyne
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...