Lev Rhyzhikov

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Norwalk, CT, US

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Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus having double telecentric illumination
- Publication number 20060017902
- Publication date Jan 26, 2006
- ASML Holding N.V.
- Lev Rhyzhikov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY