Leyi Tu

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma reactor
- Patent number 12,087,548
- Issue date Sep 10, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Leyi Tu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency electrode assembly for plasma processing apparatus,...
- Patent number 11,875,970
- Issue date Jan 16, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Longbao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency power supply system, plasma processor, and frequenc...
- Patent number 11,682,541
- Issue date Jun 20, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin assembly, an electrostatic chuck and a processing apparatu...
- Patent number 11,626,314
- Issue date Apr 11, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor and processing method
- Patent number 11,545,342
- Issue date Jan 3, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...
- Publication number 20240071724
- Publication date Feb 29, 2024
- Advanced Micro-Fabrication Equipment Inc. China
- Rubin YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA REACTOR
- Publication number 20220208521
- Publication date Jun 30, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Leyi TU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, A...
- Publication number 20210118716
- Publication date Apr 22, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Rubin YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSOR AND PROCESSING METHOD
- Publication number 20210066043
- Publication date Mar 4, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIO FREQUENCY POWER SUPPLY SYSTEM, PLASMA PROCESSOR, AND FREQUENC...
- Publication number 20210057188
- Publication date Feb 25, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radio Frequency Electrode Assembly for Plasma Processing Apparatus,...
- Publication number 20200194231
- Publication date Jun 18, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Longbao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...
- Publication number 20200185196
- Publication date Jun 11, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Rubin YE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATU...
- Publication number 20200083087
- Publication date Mar 12, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Plasma reactor

Radio frequency electrode assembly for plasma processing apparatus,...

Radio frequency power supply system, plasma processor, and frequenc...

Lift pin assembly, an electrostatic chuck and a processing apparatu...

Plasma processor and processing method

Patents Applicationslast 30 patents

METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...

PLASMA REACTOR

ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, A...

PLASMA PROCESSOR AND PROCESSING METHOD

RADIO FREQUENCY POWER SUPPLY SYSTEM, PLASMA PROCESSOR, AND FREQUENC...

Radio Frequency Electrode Assembly for Plasma Processing Apparatus,...

METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...

LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATU...