Li-Cheng Shen

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Taichung, TW

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Patents Grantslast 30 patents

Information Patent Grant
Automatic supervision system on the ion beam map for ion implantati...
- Patent number 5,886,356
- Issue date Mar 23, 1999
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pau-Lo Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Intelligent supervision system with expert system for ion implantat...
- Patent number 5,859,437
- Issue date Jan 12, 1999
- Taiwan Semiconductor Manufacturing Corporation
- Pau-Lo Hsu
- H01 - BASIC ELECTRIC ELEMENTS