Li-Chih Chaio

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Yang-Mei, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for removing polymeric residue contamination on semiconducto...
- Patent number 6,884,728
- Issue date Apr 26, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jun-Lung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improved plasma etching control
- Patent number 6,828,251
- Issue date Dec 7, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Nien Su
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for removing polymeric residue contamination on semiconducto...
- Publication number 20040087167
- Publication date May 6, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jun-Lung Huang
- H01 - BASIC ELECTRIC ELEMENTS