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Yang-Mei, TW
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Patents Grants
last 30 patents
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Patent Grant
Method for removing polymeric residue contamination on semiconducto...
Patent number
6,884,728
Issue date
Apr 26, 2005
Taiwan Semiconductor Manufacturing Co., Ltd
Jun-Lung Huang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for improved plasma etching control
Patent number
6,828,251
Issue date
Dec 7, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for removing polymeric residue contamination on semiconducto...
Publication number
20040087167
Publication date
May 6, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Jun-Lung Huang
H01 - BASIC ELECTRIC ELEMENTS