Li CHUNG-HSUN

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for measuring a property of a substrate
- Patent number 9,594,029
- Issue date Mar 14, 2017
- ASML Netherlands B.V.
- Wouter Lodewijk Elings
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Methods and Apparatus for Measuring a Property of a Substrate
- Publication number 20170160073
- Publication date Jun 8, 2017
- ASML NETHERLANDS B.V.
- Wouter Lodewijk ELINGS
- G01 - MEASURING TESTING
Information Patent Application
Methods and Apparatus for Measuring A Property of a Substrate
- Publication number 20140354969
- Publication date Dec 4, 2014
- ASML NETHERLANDS B.V.
- Wouter Lodewijk Elings
- G01 - MEASURING TESTING