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Li Diao
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for high aspect ratio photoresist removal in pure reducing p...
Patent number
11,107,693
Issue date
Aug 31, 2021
Beijing E-Town Semiconductor Technology Co., Ltd.
Li Diao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for high aspect ratio photoresist removal in pure reducing p...
Patent number
10,431,469
Issue date
Oct 1, 2019
Mattson Technology, Inc.
Li Diao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask removal process strategy for vertical NAND device
Patent number
9,396,963
Issue date
Jul 19, 2016
Mattson Technology
Li Diao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced processing technique and system for preserving tungsten in...
Patent number
8,093,157
Issue date
Jan 10, 2012
Mattson Technology, Inc.
Li Diao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method for High Aspect Ratio Photoresist Removal in Pure Reducing P...
Publication number
20200098576
Publication date
Mar 26, 2020
Mattson Technology, Inc.
Li Diao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for High Aspect Ratio Photoresist Removal in Pure Reducing P...
Publication number
20150144155
Publication date
May 28, 2015
Mattson Technology, Inc.
Li Diao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Novel Mask Removal Process Strategy for Vertical NAND Device
Publication number
20150126035
Publication date
May 7, 2015
Mattson Technology, Inc.
Li Diao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Advanced Processing Technique and System for Preserving Tungsten in...
Publication number
20090011615
Publication date
Jan 8, 2009
Li Diao
H01 - BASIC ELECTRIC ELEMENTS