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LI-HSING CHIEN
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HSINCHU COUNTY, TW
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Patents Grants
last 30 patents
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Patent Grant
In situ cleaning apparatus and system thereof
Patent number
11,273,470
Issue date
Mar 15, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Li-Hsing Chien
B08 - CLEANING
Information
Patent Grant
In situ cleaning apparatus and system thereof
Patent number
10,500,616
Issue date
Dec 10, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Li-Hsing Chien
B08 - CLEANING
Information
Patent Grant
In situ clean apparatus and method thereof
Patent number
9,643,217
Issue date
May 9, 2017
Taiwan Semiconductor Manufacturing Company Ltd.
Li-Hsing Chien
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
IN SITU CLEANING APPARATUS AND SYSTEM THEREOF
Publication number
20200101502
Publication date
Apr 2, 2020
Taiwan Semiconductor Manufacturing company Ltd.
LI-HSING CHIEN
B08 - CLEANING
Information
Patent Application
IN SITU CLEANING APPARATUS AND SYSTEM THEREOF
Publication number
20170225207
Publication date
Aug 10, 2017
Taiwan Semiconductor Manufacturing company Ltd.
LI-HSING CHIEN
B08 - CLEANING
Information
Patent Application
IN SITU CLEAN APPARATUS AND METHOD THEREOF
Publication number
20150107623
Publication date
Apr 23, 2015
Taiwan Semiconductor Manufacturing company Ltd.
LI-HSING CHIEN
B08 - CLEANING