Li-Kong Tum

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Taichung, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method of optimizing lithography tools utilization
- Patent number 9,081,306
- Issue date Jul 14, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yao-Hwan Kao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY