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Li Ling
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San Jose, CA, US
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last 30 patents
Information
Patent Grant
Using bias RF pulsing to effectively clean electrostatic chuck (ESC)
Patent number
10,410,845
Issue date
Sep 10, 2019
Applied Materials, Inc.
Kenny Linh Doan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Smart multi-level RF pulsing methods
Patent number
9,872,373
Issue date
Jan 16, 2018
Applied Materials, Inc.
Daisuke Shimizu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Etching oxide-nitride stacks using C4F6H2
Patent number
9,748,366
Issue date
Aug 29, 2017
Applied Materials, Inc.
Jong Mun Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR SUBSTRATE IN A PLA...
Publication number
20230402286
Publication date
Dec 14, 2023
Applied Materials, Inc.
Daisuke SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMIT...
Publication number
20230057145
Publication date
Feb 23, 2023
Applied Materials, Inc.
DAISUKE SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USING BIAS RF PULSING TO EFFECTIVELY CLEAN ELECTROSTATIC CHUCK (ESC)
Publication number
20190157052
Publication date
May 23, 2019
Applied Materials, Inc.
Kenny Linh DOAN
B08 - CLEANING
Information
Patent Application
ETCHING OXIDE-NITRIDE STACKS USING C4F6H2
Publication number
20150097276
Publication date
Apr 9, 2015
Applied Materials, Inc.
Jong Mun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR ETCHING OXIDE LAYERS USING PROCESS GAS PULSING
Publication number
20130224960
Publication date
Aug 29, 2013
Applied Materials, Inc.
Jairaj Payyapilly
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING HIGH ASPECT RATIO FEATURES IN A DIELECTRIC LAYER
Publication number
20130122712
Publication date
May 16, 2013
Jong Mun KIM
H01 - BASIC ELECTRIC ELEMENTS