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Li Wang
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San Ramon, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Photoemission monitoring of EUV mirror and mask surface contaminati...
Patent number
9,453,801
Issue date
Sep 27, 2016
KLA-Tencor Corporation
Li Wang
G01 - MEASURING TESTING
Information
Patent Grant
Spectral purity filter and light monitor for an EUV reticle inspect...
Patent number
9,348,214
Issue date
May 24, 2016
KLA-Tencor Corporation
Daimian Wang
G01 - MEASURING TESTING
Information
Patent Grant
Phase grating for mask inspection system
Patent number
9,151,881
Issue date
Oct 6, 2015
KLA-Tencor Corporation
Daimian Wang
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SPECTRAL PURITY FILTER AND LIGHT MONITOR FOR AN EUV ACTINIC RETICLE...
Publication number
20140217298
Publication date
Aug 7, 2014
KLA-Tencor Corporation
Daimian Wang
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND DEVICE USING PHOTOELECTRONS FOR IN-SITU BEAM POWER AND S...
Publication number
20140158894
Publication date
Jun 12, 2014
KLA-Tencor Corporation
Li Wang
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Phase Grating For Mask Inspection System
Publication number
20140131586
Publication date
May 15, 2014
KLA-Tencor Corporation
Daimian Wang
G02 - OPTICS
Information
Patent Application
PHOTOEMISSION MONITORING OF EUV MIRROR AND MASK SURFACE CONTAMINATI...
Publication number
20130313442
Publication date
Nov 28, 2013
KLA-Tencor Corporation, a Delaware Corporation
Li Wang
G01 - MEASURING TESTING