Lian-Hua Shih

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Chiayi City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method of monitoring processing system for processing substrate
- Patent number 10,606,253
- Issue date Mar 31, 2020
- United Microelectronics Corp.
- Lian-Hua Shih
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MONITORING PROCESSING SYSTEM FOR PROCESSING SUBSTRATE
- Publication number 20180224817
- Publication date Aug 9, 2018
- United Microelectronics Corp.
- Lian-Hua Shih
- G05 - CONTROLLING REGULATING
Information Patent Application
Method of virtual metrology using combined models
- Publication number 20160274570
- Publication date Sep 22, 2016
- UNITED MICROELECTRONICS CORP.
- Lian-Hua Shih
- G05 - CONTROLLING REGULATING