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Shanghai, CN
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last 30 patents
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Patent Grant
System and method of sensing and removing residual charge from a pr...
Patent number
8,111,499
Issue date
Feb 7, 2012
Advanced Micro-Fabrication Equipment, Inc. Asia
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SINGLE MATCHING NETWORK FOR MATCHING MULTI-FREQUENCY AND METHOD OF...
Publication number
20120075033
Publication date
Mar 29, 2012
Liang OUYANG
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
SYSTEM AND METHOD OF SENSING AND REMOVING RESIDUAL CHARGE FROM A PR...
Publication number
20100271744
Publication date
Oct 28, 2010
Advanced Micro-Fabrication Equipment, Inc. Asia
Tuqiang NI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND BASE FOR PLASMA REACTOR HAVING IMPROVED WAF...
Publication number
20100271745
Publication date
Oct 28, 2010
Advanced Micro-Fabrication Equipment, Inc. Asia
Jinyuan CHEN
H01 - BASIC ELECTRIC ELEMENTS