Liang-Yuh Chen

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Ithaca, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Trench-filling etch-masking microfabrication technique
- Patent number 5,770,465
- Issue date Jun 23, 1998
- Cornell Research Foundation, Inc.
- Noel C. MacDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vacuum microelectronic devices with multiple planar electrodes
- Patent number 5,637,539
- Issue date Jun 10, 1997
- Cornell Research Foundation, Inc.
- Wolfgang Hofmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolated tungsten microelectromechanical structures
- Patent number 5,399,415
- Issue date Mar 21, 1995
- Cornell Research Foundation, Inc.
- Liang-Yu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective chemical vapor deposition of tungsten for microdynamic st...
- Patent number 5,149,673
- Issue date Sep 22, 1992
- Cornell Research Foundation, Inc.
- Noel C. MacDonald
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Microdynamic release structure
- Patent number 5,072,288
- Issue date Dec 10, 1991
- Cornell Research Foundation, Inc.
- Noel C. MacDonald
- B82 - NANO-TECHNOLOGY