Lianzhong YU

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Patents Grantslast 30 patents

Information Patent Grant
MEMS micromirror and MEMS optical switch
- Patent number 10,954,119
- Issue date Mar 23, 2021
- INSTITUTE OF GEOLOGY AND GEOPHYSICS CHINESE ACADEMY OF SCIENCES (IGGCAS)
- Hang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
- Patent number 10,647,570
- Issue date May 12, 2020
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
- Patent number 10,392,247
- Issue date Aug 27, 2019
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Symmetrical MEMS accelerometer and its fabrication process
- Patent number 9,759,740
- Issue date Sep 12, 2017
- Chinese Academy of Sciences Institutes of Geology and Geophysics
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS Micromirror and MEMS Optical Switch
- Publication number 20210053818
- Publication date Feb 25, 2021
- INSTITUTE OF GEOLOGY AND GEOPHYSICS CHINESE ACADEMY OF SCIENCES (IGGCAS)
- Hang LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER
- Publication number 20190382264
- Publication date Dec 19, 2019
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER
- Publication number 20170336437
- Publication date Nov 23, 2017
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYMMETRICAL MEMS ACCELEROMETER AND ITS FABRICATION PROCESS
- Publication number 20160018436
- Publication date Jan 21, 2016
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong YU
- G01 - MEASURING TESTING