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Lie-Quan Lee
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Loosely-coupled inspection and metrology system for high-volume pro...
Patent number
11,562,289
Issue date
Jan 24, 2023
KLA Corporation
Song Wu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Automatic wavelength or angle pruning for optical metrology
Patent number
11,175,589
Issue date
Nov 16, 2021
KLA Corporation
Lie-Quan Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Automatic selection of sample values for optical metrology
Patent number
10,895,810
Issue date
Jan 19, 2021
KLA Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement library optimization in semiconductor metrology
Patent number
10,732,520
Issue date
Aug 4, 2020
KLA-Tencor Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Automated metrology system selection
Patent number
10,502,692
Issue date
Dec 10, 2019
KLA-Tencor Corporation
Meng Cao
G01 - MEASURING TESTING
Information
Patent Grant
Dynamic removal of correlation of highly correlated parameters for...
Patent number
10,386,729
Issue date
Aug 20, 2019
KLA-Tencor Corporation
Lie-Quan Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement library optimization in semiconductor metrology
Patent number
10,345,721
Issue date
Jul 9, 2019
KLA-Tencor Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Model optimization approach based on spectral sensitivity
Patent number
10,255,385
Issue date
Apr 9, 2019
KLA-Tencor Corporation
Stilian Ivanov Pandev
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Accurate and fast neural network training for library-based critica...
Patent number
9,607,265
Issue date
Mar 28, 2017
KLA-Tencor Corporation
Wen Jin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor device models including re-usable sub-structures
Patent number
9,553,033
Issue date
Jan 24, 2017
KLA-Tencor Corporation
Jonathan Iloreta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Meta-model based measurement refinement
Patent number
9,347,872
Issue date
May 24, 2016
KLA-Tencor Corporation
Leonid Poslavsky
G01 - MEASURING TESTING
Information
Patent Grant
Accurate and fast neural network training for library-based critica...
Patent number
8,577,820
Issue date
Nov 5, 2013
Tokyo Electron Limited
Wen Jin
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
Fleet Matching Of Semiconductor Metrology Tools Without Dedicated Q...
Publication number
20210375651
Publication date
Dec 2, 2021
KLA Corporation
Song Wu
G01 - MEASURING TESTING
Information
Patent Application
Loosely-Coupled Inspection and Metrology System for High-Volume Pro...
Publication number
20200184372
Publication date
Jun 11, 2020
KLA-Tencor Corporation
Song Wu
G01 - MEASURING TESTING
Information
Patent Application
Automated Metrology System Selection
Publication number
20170023491
Publication date
Jan 26, 2017
KLA-Tencor Corporation
Meng Cao
G01 - MEASURING TESTING
Information
Patent Application
Semiconductor Device Models Including Re-Usable Sub-Structures
Publication number
20150199463
Publication date
Jul 16, 2015
KLA-Tencor Corporation
Jonathan Iloreta
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
AUTOMATIC SELECTION OF SAMPLE VALUES FOR OPTICAL METROLOGY
Publication number
20150142395
Publication date
May 21, 2015
Meng Cao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DYNAMIC REMOVAL OF CORRELATION OF HIGHLY CORRELATED PARAMETERS FOR...
Publication number
20140358488
Publication date
Dec 4, 2014
Lie-Quan Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AUTOMATIC WAVELENGTH OR ANGLE PRUNING FOR OPTICAL METROLOGY
Publication number
20140358485
Publication date
Dec 4, 2014
Lie-Quan Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICA...
Publication number
20140032463
Publication date
Jan 30, 2014
Wen Jin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MODEL OPTIMIZATION APPROACH BASED ON SPECTRAL SENSITIVITY
Publication number
20130262044
Publication date
Oct 3, 2013
Stilian Ivanov Pandev
G01 - MEASURING TESTING
Information
Patent Application
LIBRARY GENERATION WITH DERIVATIVES IN OPTICAL METROLOGY
Publication number
20130158957
Publication date
Jun 20, 2013
Lie-Quan Lee
G01 - MEASURING TESTING
Information
Patent Application
Accurate and Fast Neural network Training for Library-Based Critica...
Publication number
20120226644
Publication date
Sep 6, 2012
Wen Jin
G06 - COMPUTING CALCULATING COUNTING