Lien-Sheng CHUNG

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Hsinchu County, TW

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Patents Grantslast 30 patents

Information Patent Grant
Misalignment/alignment compensation method, semiconductor lithograp...
- Patent number 10,186,443
- Issue date Jan 22, 2019
- Lien-Sheng Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Misalignment/alignment compensation method, semiconductor lithograp...
- Patent number 9,490,181
- Issue date Nov 8, 2016
- Lien-Sheng Chung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MISALIGNMENT/ALIGNMENT COMPENSATION METHOD, SEMICONDUCTOR LITHOGRAP...
- Publication number 20170018447
- Publication date Jan 19, 2017
- Lien-Sheng CHUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MISALIGNMENT/ALIGNMENT COMPENSATION METHOD, SEMICONDUCTOR LITHOGRAP...
- Publication number 20150140693
- Publication date May 21, 2015
- Lien-Sheng CHUNG
- G01 - MEASURING TESTING