Lien Yo Tsai

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Device for protecting FEOL element and BEOL element
- Patent number 12,297,103
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ping-Chun Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waveguide structure and manufacturing method of the same
- Patent number 11,513,287
- Issue date Nov 29, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai-Fung Chang
- G02 - OPTICS
Information Patent Grant
Device for protecting FEOL element and BEOL element
- Patent number 11,345,591
- Issue date May 31, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ping-Chun Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for manufacturing semiconductor device
- Patent number 11,062,903
- Issue date Jul 13, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Neena Avinash Gilda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS devices and methods of forming the same
- Patent number 10,981,779
- Issue date Apr 20, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming micro-electro-mechanical system (MEMS) structure
- Patent number 10,865,100
- Issue date Dec 15, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device including a capacitor
- Patent number 10,861,929
- Issue date Dec 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for manufacturing semiconductor device
- Patent number 10,777,733
- Issue date Sep 15, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Neena Avinash Gilda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of the same
- Patent number 10,712,500
- Issue date Jul 14, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai-Fung Chang
- G02 - OPTICS
Information Patent Grant
Device for protecting FEOL element and BEOL element
- Patent number 10,508,028
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ping-Chun Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structure including isolatio...
- Patent number 10,343,895
- Issue date Jul 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with multi pressure
- Patent number 10,266,400
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for protecting FEOL element and BEOL element
- Patent number 10,155,660
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ping Chun Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems (MEMS) stopper structure for stictio...
- Patent number 10,150,664
- Issue date Dec 11, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 10,112,822
- Issue date Oct 30, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming the same
- Patent number 9,926,190
- Issue date Mar 27, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure and manufacturing method thereof
- Patent number 9,868,630
- Issue date Jan 16, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS cap with multi pressure
- Patent number 9,764,948
- Issue date Sep 19, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a bonding layer embedded in the cap
- Patent number 9,540,231
- Issue date Jan 10, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method of forming a split-gate flash memory structure in...
- Patent number 7,884,412
- Issue date Feb 8, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shieh Feng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of forming a split-gate flash memory structure
- Patent number 7,148,098
- Issue date Dec 12, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shieh Feng Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
- Publication number 20220289564
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Chun YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20200341192
- Publication date Oct 29, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- KAI-FUNG CHANG
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200168789
- Publication date May 28, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- Neena Avinash GILDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200135446
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- Neena Avinash GILDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20200124790
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- KAI-FUNG CHANG
- G02 - OPTICS
Information Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
- Publication number 20200115223
- Publication date Apr 16, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Chun YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE INCLUDING A CAPACITOR
- Publication number 20200006470
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Fung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURE
- Publication number 20190315620
- Publication date Oct 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Fung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
- Publication number 20190112184
- Publication date Apr 18, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Chun YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURE AND METHOD FOR FOR...
- Publication number 20190002275
- Publication date Jan 3, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Fung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20180230001
- Publication date Aug 16, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Fung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Devices and Methods of Forming the Same
- Publication number 20180194618
- Publication date Jul 12, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with Multi Pressure
- Publication number 20180002166
- Publication date Jan 4, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20170334711
- Publication date Nov 23, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kai-Fung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Devices and Methods of Forming the Same
- Publication number 20170210618
- Publication date Jul 27, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Cap with Multi Pressure
- Publication number 20170210619
- Publication date Jul 27, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE AND METHOD FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
- Publication number 20160214855
- Publication date Jul 28, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping Chun YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) STOPPER STRUCTURE FOR STICTIO...
- Publication number 20160167945
- Publication date Jun 16, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Kai-Fung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20150210537
- Publication date Jul 30, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Kai-Fung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and Method of Forming A Split-Gate Flash Memory Structure
- Publication number 20070145457
- Publication date Jun 28, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shieh Feng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method of forming a split-gate flash memory structure
- Publication number 20050280073
- Publication date Dec 22, 2005
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shieh Feng Huang
- H01 - BASIC ELECTRIC ELEMENTS

Lien Yo Tsai

Person

Patents Grantslast 30 patents

Device for protecting FEOL element and BEOL element

Waveguide structure and manufacturing method of the same

Device for protecting FEOL element and BEOL element

Method and apparatus for manufacturing semiconductor device

MEMS devices and methods of forming the same

Method for forming micro-electro-mechanical system (MEMS) structure

Electronic device including a capacitor

Method and apparatus for manufacturing semiconductor device

Semiconductor device and manufacturing method of the same

Device for protecting FEOL element and BEOL element

Micro-electro-mechanical system (MEMS) structure including isolatio...

MEMS device with multi pressure

Device and method for protecting FEOL element and BEOL element

Microelectromechanical systems (MEMS) stopper structure for stictio...

Semiconductor device

MEMS devices and methods of forming the same

Package structure and manufacturing method thereof

MEMS cap with multi pressure

MEMS device with a bonding layer embedded in the cap

System and method of forming a split-gate flash memory structure in...

System and method of forming a split-gate flash memory structure

Patents Applicationslast 30 patents

DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT

WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD OF THE SAME

METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT

ELECTRONIC DEVICE INCLUDING A CAPACITOR

METHOD FOR FORMING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURE

DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURE AND METHOD FOR FOR...

SEMICONDUCTOR DEVICE

MEMS Devices and Methods of Forming the Same

MEMS Device with Multi Pressure

PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF

MEMS Devices and Methods of Forming the Same

MEMS Cap with Multi Pressure

DEVICE AND METHOD FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT

MICROELECTROMECHANICAL SYSTEMS (MEMS) STOPPER STRUCTURE FOR STICTIO...

SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME

System and Method of Forming A Split-Gate Flash Memory Structure

System and method of forming a split-gate flash memory structure