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Patents Grantslast 30 patents

Information Patent Grant
Method of controlling a patterning process, lithographic apparatus,...
- Patent number 11,048,174
- Issue date Jun 29, 2021
- ASML Netherlands B.V.
- Michael Kubis
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CONTROLLING A PATTERNING PROCESS, LITHOGRAPHIC APPARATUS,...
- Publication number 20200233311
- Publication date Jul 23, 2020
- Michael KUBIS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS TO MONITOR A PROCESS APPARATUS
- Publication number 20190214318
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Mark John MASLOW
- H01 - BASIC ELECTRIC ELEMENTS