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Lih-Huah Yiin
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Mountain View, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for database-assisted requalification reticle...
Patent number
9,733,640
Issue date
Aug 15, 2017
KLA-Tencor Corporation
Lih-Huah Yiin
G05 - CONTROLLING REGULATING
Information
Patent Grant
Detection of thin lines for selective sensitivity during reticle in...
Patent number
9,092,847
Issue date
Jul 28, 2015
KLA-Tencor Corporation
Zhengyu Wang
G01 - MEASURING TESTING
Information
Patent Grant
Detection of thin lines for selective sensitivity during reticle in...
Patent number
8,855,400
Issue date
Oct 7, 2014
KLA-Tencor Corporation
Zhengyu Wang
G01 - MEASURING TESTING
Information
Patent Grant
Detection of thin line for selective sensitivity during reticle ins...
Patent number
8,090,189
Issue date
Jan 3, 2012
KLA-Tencor Corporation
Vinayak Dattatreya Phalke
G01 - MEASURING TESTING
Information
Patent Grant
Method for detecting lithographically significant defects on reticles
Patent number
7,873,204
Issue date
Jan 18, 2011
KLA-Tencor Corporation
Mark J. Wihl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Closed region defect detection system
Patent number
7,499,156
Issue date
Mar 3, 2009
KLA-Tencor Technologies Corporation
George Q. Chen
G01 - MEASURING TESTING
Information
Patent Grant
Visualization of photomask databases
Patent number
7,167,185
Issue date
Jan 23, 2007
KLA-Tencor Technologies Corporation
Lih-Huah Yiin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Closed region defect detection system
Patent number
7,126,681
Issue date
Oct 24, 2006
KLA-Tencor Technologies Corporation
George Q. Chen
G01 - MEASURING TESTING
Information
Patent Grant
Multiple design database layer inspection
Patent number
7,027,635
Issue date
Apr 11, 2006
KLA-Tencor Technologies Corporation
Mark J. Wihl
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR DATABASE-ASSISTED REQUALIFICATION RETICLE...
Publication number
20150005917
Publication date
Jan 1, 2015
KLA-Tencor Corporation
Lih-Huah Yiin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DETECTION OF THIN LINES FOR SELECTIVE SENSITIVITY DURING RETICLE IN...
Publication number
20140369593
Publication date
Dec 18, 2014
KLA-Tencor Corporation
Zhengyu Wang
G01 - MEASURING TESTING
Information
Patent Application
DETECTION OF THIN LINES FOR SELECTIVE SENSITIVITY DURING RETICLE IN...
Publication number
20130236083
Publication date
Sep 12, 2013
KLA-Tencor Corporation
Zhengyu Wang
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DETECTING LITHOGRAPHICALLY SIGNIFICANT DEFECTS ON RETICLES
Publication number
20080170773
Publication date
Jul 17, 2008
KLA-Tencor Technologies Corporation
Mark J. Wihl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Closed region defect detection system
Publication number
20070035727
Publication date
Feb 15, 2007
KLA-Tencor Corporation
George Q. Chen
G01 - MEASURING TESTING